SYNOPSYS光学设计软件中的光线控制语法如下: ]h`&&B qt
AANT NWESP U):w
M tar wt {A/S/MUL/DIV} {icol/P} name hbar xen yen gbar surf zaIKdI'/e
END tAd%#:K
LVM%"sd?
Y(ykng
name: >b}o~F^J
YA YC YP XA XC XP ZA OPD OPP ZZ HH mthA4sz
XL YL ZL XG YG ZG XE YE ZE ZZL HHL ZZG HHG C}j"Qi`
DSLOPE UNI FLUX PL g/d<Zfq<{
HFREQ HEFFIC HSFREQ ERROR 'ZF{R3Xu
OPL ... jsss jsps 6Igz:eX
2QcOR4_V
例如: 5DU6rks%
M 0 1 A P YA 0 0 1 ! 0视场的边缘光线控制为 0 #P9~}JB3,
lN)C2 2
n+9=1Oo"
R_cA:3qc~