SYNOPSYS光学设计软件中的光线控制语法如下： Ai 8+U)
AANT 9.~ _swkv
M tar wt {A/S/MUL/DIV} {icol/P} name hbar xen yen gbar surf ]I/* J^
END -`spu)
!3c+}j -j
1 Cz}| #U
name: })mD{c/
YA YC YP XA XC XP ZA OPD OPP ZZ HH %F-yF N"
XL YL ZL XG YG ZG XE YE ZE ZZL HHL ZZG HHG &C9)%5 O)
DSLOPE UNI FLUX PL QDK }e:4q
HFREQ HEFFIC HSFREQ ERROR if1)AE-
OPL ... jsss jsps (Cti,g~
y^X]q[-?
例如: RcR -sbR
M 0 1 A P YA 0 0 1 ! 0视场的边缘光线控制为 0 g[ @Q iy
;u' ;$0
C^] UK
\:JY[s/
