SYNOPSYS光学设计软件中的光线控制语法如下: +#9 4X)*
AANT Y(=A HmR
M tar wt {A/S/MUL/DIV} {icol/P} name hbar xen yen gbar surf h!?rk|
END -Eoq#ULvR
bWJ&SR>
hG>kx8h
name: 1}~`g ED
YA YC YP XA XC XP ZA OPD OPP ZZ HH _pxurq{
XL YL ZL XG YG ZG XE YE ZE ZZL HHL ZZG HHG \LM.>vJ
DSLOPE UNI FLUX PL ^O,r8K{1n
HFREQ HEFFIC HSFREQ ERROR Sl'{rol'
OPL ... jsss jsps /rHlFl|Wy
ZqXp f
例如: f o idneus
M 0 1 A P YA 0 0 1 ! 0视场的边缘光线控制为 0 Z=oGyA
0+/ew8~$
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