SYNOPSYS光学设计软件中的光线控制语法如下: h [*/Tnr
AANT R|&jvG=|
M tar wt {A/S/MUL/DIV} {icol/P} name hbar xen yen gbar surf g{PEplk
END iWu
zI-]K,!
{BV0Y.O
name: 5<64 C}fE3
YA YC YP XA XC XP ZA OPD OPP ZZ HH :Kq]b@X
XL YL ZL XG YG ZG XE YE ZE ZZL HHL ZZG HHG \jA#RF.W
DSLOPE UNI FLUX PL I;xSd.-
HFREQ HEFFIC HSFREQ ERROR Y oDL/
OPL ... jsss jsps 7)Cn 4{B6
suOWmqLs
例如: H@,h$$
M 0 1 A P YA 0 0 1 ! 0视场的边缘光线控制为 0 '#<4oW\]
tKS'#y!R
s#Ayl]8r
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