SYNOPSYS光学设计软件中的光线控制语法如下: vr5<LNCLQ
AANT @DRfNJ}
M tar wt {A/S/MUL/DIV} {icol/P} name hbar xen yen gbar surf PpI+@:p[
END &:IfhS
9N`+ O
Fa Qu$q
name: _gis+f/8h
YA YC YP XA XC XP ZA OPD OPP ZZ HH Z:W')Nd(
XL YL ZL XG YG ZG XE YE ZE ZZL HHL ZZG HHG g9RzzE!
DSLOPE UNI FLUX PL sqgD?:@J
HFREQ HEFFIC HSFREQ ERROR 9CgXc5
OPL ... jsss jsps =P@M&Yy'
ayB=|*Q"
例如:
dfYYyE
M 0 1 A P YA 0 0 1 ! 0视场的边缘光线控制为 0 WMt&8W5
]0at2
&6=TtTp"9
XY&]T'A