美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applics [复制链接]

美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications YDDwvk H  
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目录： W]rXt,{&  
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Chapter 1 Atom, Molecule, and Nanocluster Manipulations iRPd=)  
                for Nanostructure Fabrication Using Scanning f2yc]I<lr~  
                Probe Microscopy 1 nY(jN D  
                A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo tCA |sN  
Chapter 2 Atomic Force Microscope Lithography 33 *d(wOl5[  
                N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park u8o!ncy  
Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, 0w(<pNA  
                Sensing, and Modification 65 ~tz[=3!1H  
                C. Santschi, J. Polesel-Maris, J. Brugger, {uw'7 d/  
                and H. Heinzelmann <G6wpf8M  
Chapter 4 Using Biomolecules for Self-Assembly of Engineered #%+IU  
                Nano-Scale Structures and Devices 127 I80.|KIv  
               R. Mehta, J. Lund, and B. A. Parviz qjTz]'^BpM  
Chapter 5 Nanofabrication Based on Self-Assembled Ue-HO  
               Alumina Templates 159 X'iki4  
               S. Sen and N. A. Kouklin sPbtv[bC  
Chapter 6 Nanowire Assembly and Integration 187 cZ o]*Gv.  
                Z. Gu and D. H. Gracias :X@;XEol~
 
Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 :*Ckq~[Hg  
                 L. Tong and E. Mazur ] niWRl
 
Chapter 8 Extreme Ultraviolet Lithography 235 7E|0'PPR  
                 H. Kinoshita x)V.^-  
Chapter 9 Electron Projection Lithography 285 ^\_`0%`>  
                 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata 1!=$3]l0Lj  
Chapter 10 Electron Beam Direct Writing 341 AKL~F|t  
                   K. Yamazaki s31^9a  
Chapter 11 Electron Beam Induced Deposition 377 ~r|.GY  
                   K. Mitsuishi rytizbc  
Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 V ;>{-p  
                   P. A. Crozier and C. W. Hagen )vy<q/o+  
Chapter 13 Focused Ion Beams and Interaction with Solids 431 Sqfa,3?L  
                    T. Ishitani, T. Ohnishi, and T. Yaguchi Wx:_F;  
Chapter 14 Nano/Microstructuring of Ceramic Surfaces )w/f 'fq  
                  by Unconventional Lithographic Methods 471 d6(qc< /!r  
                  R. C. Salvarezza and O. Azzaroni ,[~Ydth  
Chapter 15 Alternative Nanofabrication Approaches p>R F4  
f                 or Non-CMOS Applications 499 )Cx8?\/c=x  
                   C. V. Cojocaru, F. Cicoira, and F. Rosei kqHh@]Z0'  
Chapter 16 Nanofabrication of Nanoelectromechanical Systems RV&2y=eb  
                  (NEMS): Emerging Techniques 543 vy-{BH  
                  K. L. Ekinci and J. Brugger W*8D@a0 _  

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一直想学习下纳米制造的工艺和理论，谢谢楼主分享