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纳米制造基础及应用” Nanofabrication - Fundamentals & Applications
C+_ NG UhNeY{6 目录:
I<DS07K UPH:$Fk& [!"u&iu` Chapter 1 Atom, Molecule, and Nanocluster Manipulations
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mZ for Nanostructure Fabrication Using Scanning
y 2bZo'Z Probe Microscopy 1
DEIn:d A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo
fN@2 B Chapter 2 Atomic Force Microscope Lithography 33
ds`a6>746 N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park
e(cctC|l Chapter 3 Scanning Probe Arrays for Nanoscale Imaging,
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. Sensing, and Modification 65
E}UlQq C. Santschi, J. Polesel-Maris, J. Brugger,
wT;D<rqe` and H. Heinzelmann
?_IRO| Chapter 4 Using Biomolecules for Self-Assembly of Engineered
0e&Vvl4DK Nano-Scale Structures and Devices 127
H'GyWG|Wx R. Mehta, J. Lund, and B. A. Parviz
t68h$u Chapter 5 Nanofabrication Based on Self-Assembled
k \|Hd"T Alumina Templates 159
$w{#o E S. Sen and N. A. Kouklin
G0^NkH,k Chapter 6 Nanowire Assembly and Integration 187
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Z. Gu and D. H. Gracias
UW!!! Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213
1qtu,yIf L. Tong and E. Mazur
nI&Tr_"tm Chapter 8 Extreme Ultraviolet Lithography 235
;a2TONW H. Kinoshita
smJ%^'x Chapter 9 Electron Projection Lithography 285
U\P ;,o T. Miura, K. Suzuki, H. Arimoto, and S. Kawata
s J,:[ Chapter 10 Electron Beam Direct Writing 341
i!9yN:m0 K. Yamazaki
a8''t_Dp Chapter 11 Electron Beam Induced Deposition 377
#7GbG\ K. Mitsuishi
?J|~G{yH Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399
p \1-. P. A. Crozier and C. W. Hagen
.>_p7=a Chapter 13 Focused Ion Beams and Interaction with Solids 431
{'T=&`&OF T. Ishitani, T. Ohnishi, and T. Yaguchi
b+,u_$@B Chapter 14 Nano/Microstructuring of Ceramic Surfaces
f3h^R20qmO by Unconventional Lithographic Methods 471
5^+>*z R. C. Salvarezza and O. Azzaroni
Mz_*`lRN Chapter 15 Alternative Nanofabrication Approaches
ZBi|BD f or Non-CMOS Applications 499
j'g':U C. V. Cojocaru, F. Cicoira, and F. Rosei
N^H~VG&D( Chapter 16 Nanofabrication of Nanoelectromechanical Systems
4fgA3% (NEMS): Emerging Techniques 543
BNL Q] K. L. Ekinci and J. Brugger
pbt/i+! va[@XGaC3 [ 此帖被wildcat在2009-11-17 18:36重新编辑 ]