美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applics [复制链接]

美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications j/<y  
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目录： a<wZv-\Vau  
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Chapter 1 Atom, Molecule, and Nanocluster Manipulations bUN,P"  
                for Nanostructure Fabrication Using Scanning O->eg  
                Probe Microscopy 1 Fnpn_O XlH  
                A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo z#VpS=  
Chapter 2 Atomic Force Microscope Lithography 33 \+3Wd$I  
                N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park 0Qp'}_  
Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, ^\&g
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                Sensing, and Modification 65 Yp]G)}'R  
                C. Santschi, J. Polesel-Maris, J. Brugger, 3\n{,Q  
                and H. Heinzelmann r^t{Ii~  
Chapter 4 Using Biomolecules for Self-Assembly of Engineered 8 %j{4$  
                Nano-Scale Structures and Devices 127 s[q4K  
               R. Mehta, J. Lund, and B. A. Parviz c@-K  
Chapter 5 Nanofabrication Based on Self-Assembled 4nH91Z9=  
               Alumina Templates 159 k|3(dXLG  
               S. Sen and N. A. Kouklin 1=Zw=ufqV  
Chapter 6 Nanowire Assembly and Integration 187 \( <{)GpBi  
                Z. Gu and D. H. Gracias WKl'  
Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 RQCQGa^cP  
                 L. Tong and E. Mazur hIQ[:f  
Chapter 8 Extreme Ultraviolet Lithography 235 g&3#22z  
                 H. Kinoshita cXcx_-  
Chapter 9 Electron Projection Lithography 285 : W^\ mH
 
                 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata $p3Wjf:bH  
Chapter 10 Electron Beam Direct Writing 341 +M##mRD  
                   K. Yamazaki ZQ9oZHUm  
Chapter 11 Electron Beam Induced Deposition 377 h ^h-pd  
                   K. Mitsuishi bmVgTm&  
Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 qH Ga  
                   P. A. Crozier and C. W. Hagen 8I\eromG  
Chapter 13 Focused Ion Beams and Interaction with Solids 431 Hu9R.[u  
                    T. Ishitani, T. Ohnishi, and T. Yaguchi ; eF4J  
Chapter 14 Nano/Microstructuring of Ceramic Surfaces P%`R7yk  
                  by Unconventional Lithographic Methods 471 ]cqZ!4?_  
                  R. C. Salvarezza and O. Azzaroni 9G&l qfX:  
Chapter 15 Alternative Nanofabrication Approaches S"^KJUUc  
f                 or Non-CMOS Applications 499 ]KK ZbEO  
                   C. V. Cojocaru, F. Cicoira, and F. Rosei :aq>  
Chapter 16 Nanofabrication of Nanoelectromechanical Systems < mK  
                  (NEMS): Emerging Techniques 543 zt)PZff/YQ  
                  K. L. Ekinci and J. Brugger ^wF@6e7/&  
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3X!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!

一直想学习下纳米制造的工艺和理论，谢谢楼主分享