如果採用 Code V 軟體,那麼可以用 SAGF 函數計算面深(Sag)量: y,3ZdY"
SAGF(surface_num, zoom_pos, x_coord, y_coord) - Sag of the designated surface at x_coord, y_coord 7-!n-
|=m.eU
如果想知道的是某一非球面的型狀是否能由干涉儀測量,那麼 Code V 提供兩個函數: -4&
i t:
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(1) 使用 Zygo 干涉儀 S!.sc
函數 @VFA(zoom #, surface #, height) ,1$F#Eh
Surface is testable for @VFA < 1.0 ]MosiMJF
Surface is not testable for @VFA > 1.0 ;ryNfP%
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(2)使用 QED 干涉儀 mV$ebFco0
函數 @SSIa(surface #, zoom #, height) o1x1SH
0 <= @SSIa < 0.5 - surface is readily testable J5I@*f)l
0.5 <= @SSIa < 1 - surface is marginally testable dkZe.pv$j
@SSIa >= 1 - surface is difficult to test