如果採用 Code V 軟體,那麼可以用 SAGF 函數計算面深(Sag)量: =V|jd'iwx
SAGF(surface_num, zoom_pos, x_coord, y_coord) - Sag of the designated surface at x_coord, y_coord r<fcZ)jt|
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如果想知道的是某一非球面的型狀是否能由干涉儀測量,那麼 Code V 提供兩個函數: ]}lt^7\=
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(1) 使用 Zygo 干涉儀 1s(T#jh
函數 @VFA(zoom #, surface #, height)
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Surface is testable for @VFA < 1.0 m[xl)/e
Surface is not testable for @VFA > 1.0 O
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(2)使用 QED 干涉儀 WfaMu|
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函數 @SSIa(surface #, zoom #, height) VA[EY`8
0 <= @SSIa < 0.5 - surface is readily testable %?+vtX
0.5 <= @SSIa < 1 - surface is marginally testable 7qyPI
@SSIa >= 1 - surface is difficult to test