Abstract bWfT-Jewh
Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. 7&
G#&d
-------------------------------------------------------------------------------- ?M@ff0
Inventors: Rostalski, Hans-Juergen; (Berlin, DE) ; Schuster, Karl-Heinz; (Koenigsbronn, DE) ; Hudyma, Russell; (San Ramon, CA) ; Ulrich, Wilhelm; (Aalen, DE) ; Freimann, Rolf; (Aalen, DE) >`D$Jz,
Correspondence Name and Address: SUGHRUE MION, PLLC CC{{@
2100 PENNSYLVANIA AVENUE, N.W. ?<eH!MHF
SUITE 800 n*vhCe L
WASHINGTON {qPu }? 0
DC ~ YCZvJ
20037 >r5s>A[YC
US }C9 P--
iP+3)
Assignee Name and Adress: CARL ZEISS SMT AG ;\)N7SJ
R7~#7qKQB
Serial No.: 931051 &{H LYxh
Series Code: 10 ]R8JBnA
Filed: September 1, 2004 D;WQNlTU
Y@R9+ 7!
U.S. Current Class: 359/649 p;YS`*!s
U.S. Class at Publication: 359/649 {{ /-v3n
Intern'l Class: G02B 003/00; G02B 009/00 V [ r1bF
; `-@L
-------------------------------------------------------------------------------- t {Xf3.
$ jgEB+
Foreign Application Data $WHm G!)*
},(Ln%M
-------------------------------------------------------------------------------- :x /L.Bz
Date Code Application Number S|v")6
Sep 12, 2003 WO 03/075049 A2 sj\kp
ni
Feb 6, 2003 WO PCT/EP03/01147 Vq K/GWg
Sep 12, 2003 WO 03/075096 A2 23~Kz C
=P\Tk)(`
-------------------------------------------------------------------------------- \?rBtD(
^Y-
S"Ks
Claims ,T\) % q
}KCb5_MDF
-------------------------------------------------------------------------------- $3Sr r*
1. A refractive projection objective for microlithography with a numerical aperture NA greater than 0.7, consisting of: a first lens group immediately following an object plane of the projection objective and having negative refractive power; a second lens group immediately following the first lens group and having positive refractive power; a third lens group immediately following the second lens group and having negative refractive power for generating a constriction of a light beam passing through the projection objective; a fourth lens group immediately following the third lens group and having positive refractive power; and a fifth lens group immediately following the fourth lens group and having positive refractive power; the projection objective thereby consisting of a first convexity, a second convexity, and a waist arranged between the first and second convexity, wherein the first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. BP`'1Ns
8^|lsB}x?
2. A refractive projection objective according to claim 1, wherein the following relationship of the maximum diameters holds: 0.9<D.sub.1/D.sub.2<1.0. m03]SF(#3
}E]& ,[4&M
3. A refractive projection objective which, in the direction of propagation of the light, consists of a first lens group with negative refractive power, of a second lens group with positive refractive power, and of a third lens group with negative refractive power, for the provision of a constriction of the light beam, and of a following fourth lens group with positive refractive power, and of a system diaphragm with a following fifth lens group, which has positive refractive power, wherein before the diaphragm and after the diaphragm a respective meniscus lens curved toward the object is arranged. 。。。。。。
