Abstract R !&9RvNw
Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. nA owFdCD
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Inventors: Rostalski, Hans-Juergen; (Berlin, DE) ; Schuster, Karl-Heinz; (Koenigsbronn, DE) ; Hudyma, Russell; (San Ramon, CA) ; Ulrich, Wilhelm; (Aalen, DE) ; Freimann, Rolf; (Aalen, DE) #a I(fQZe
Correspondence Name and Address: SUGHRUE MION, PLLC xB5qX7*.
2100 PENNSYLVANIA AVENUE, N.W. a]H&k$!c
SUITE 800 an q1zH
WASHINGTON B&fH
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20037 BD. &K_AW
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Assignee Name and Adress: CARL ZEISS SMT AG &t)$5\r
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Serial No.: 931051 ^VI\:<\{
Series Code: 10 /(oxK>*F
Filed: September 1, 2004 %f)%FN . S
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U.S. Current Class: 359/649 osM[X v
U.S. Class at Publication: 359/649 h`i*~${yg
Intern'l Class: G02B 003/00; G02B 009/00 M r-l
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Foreign Application Data 8|JPQDS7
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Date Code Application Number i/{dD"HwM
Sep 12, 2003 WO 03/075049 A2 |@W|nbAfX
Feb 6, 2003 WO PCT/EP03/01147 U8S<wf&
Sep 12, 2003 WO 03/075096 A2 ?_ -5W9
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Claims n +v(t
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1. A refractive projection objective for microlithography with a numerical aperture NA greater than 0.7, consisting of: a first lens group immediately following an object plane of the projection objective and having negative refractive power; a second lens group immediately following the first lens group and having positive refractive power; a third lens group immediately following the second lens group and having negative refractive power for generating a constriction of a light beam passing through the projection objective; a fourth lens group immediately following the third lens group and having positive refractive power; and a fifth lens group immediately following the fourth lens group and having positive refractive power; the projection objective thereby consisting of a first convexity, a second convexity, and a waist arranged between the first and second convexity, wherein the first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. {K N7Y"AI
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2. A refractive projection objective according to claim 1, wherein the following relationship of the maximum diameters holds: 0.9<D.sub.1/D.sub.2<1.0. \E
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3. A refractive projection objective which, in the direction of propagation of the light, consists of a first lens group with negative refractive power, of a second lens group with positive refractive power, and of a third lens group with negative refractive power, for the provision of a constriction of the light beam, and of a following fourth lens group with positive refractive power, and of a system diaphragm with a following fifth lens group, which has positive refractive power, wherein before the diaphragm and after the diaphragm a respective meniscus lens curved toward the object is arranged. 。。。。。。
