Abstract =0 C l
Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. Ypn%[sSOp
-------------------------------------------------------------------------------- T.R>xd`9
"
Inventors: Rostalski, Hans-Juergen; (Berlin, DE) ; Schuster, Karl-Heinz; (Koenigsbronn, DE) ; Hudyma, Russell; (San Ramon, CA) ; Ulrich, Wilhelm; (Aalen, DE) ; Freimann, Rolf; (Aalen, DE) V(lK`dY
Correspondence Name and Address: SUGHRUE MION, PLLC fw:7Q7
qo
2100 PENNSYLVANIA AVENUE, N.W. q(ZB.
SUITE 800 F,L82N6\U
WASHINGTON 1*! c
X
DC 45r]wT(C
20037 <<7,k f R
US _q$0lqq~u
uS:
A4tN
Assignee Name and Adress: CARL ZEISS SMT AG {*M>X}voS
{UX"Epd);n
Serial No.: 931051 Q>}e IQ Y
Series Code: 10 ~!3t8Hx6
Filed: September 1, 2004 .\ ;l -U
B%%.@[o,
U.S. Current Class: 359/649 :c~9>GCE&
U.S. Class at Publication: 359/649 tAb;/tM3I
Intern'l Class: G02B 003/00; G02B 009/00 dD v{9D,
lQp89*b?=U
-------------------------------------------------------------------------------- 9D{u,Q V
LT,iS)dY+
Foreign Application Data {~j /XB
zK '
_e&*
-------------------------------------------------------------------------------- gD,YQ%aq
Date Code Application Number D+ah ok
Sep 12, 2003 WO 03/075049 A2 ++Rdv0 ~
Feb 6, 2003 WO PCT/EP03/01147 i$`|Y*
Sep 12, 2003 WO 03/075096 A2 Dh\S`nfFq
G zJ9N`
-------------------------------------------------------------------------------- ;-3h ~k
p<of<YU)
Claims AI^AK0.L
q;~R:}?@
-------------------------------------------------------------------------------- 8F O1`%8Oe
1. A refractive projection objective for microlithography with a numerical aperture NA greater than 0.7, consisting of: a first lens group immediately following an object plane of the projection objective and having negative refractive power; a second lens group immediately following the first lens group and having positive refractive power; a third lens group immediately following the second lens group and having negative refractive power for generating a constriction of a light beam passing through the projection objective; a fourth lens group immediately following the third lens group and having positive refractive power; and a fifth lens group immediately following the fourth lens group and having positive refractive power; the projection objective thereby consisting of a first convexity, a second convexity, and a waist arranged between the first and second convexity, wherein the first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. T8,k7 7
]6a/0rg:t
2. A refractive projection objective according to claim 1, wherein the following relationship of the maximum diameters holds: 0.9<D.sub.1/D.sub.2<1.0. 6T^N!3p_
&K9VEMCEX
3. A refractive projection objective which, in the direction of propagation of the light, consists of a first lens group with negative refractive power, of a second lens group with positive refractive power, and of a third lens group with negative refractive power, for the provision of a constriction of the light beam, and of a following fourth lens group with positive refractive power, and of a system diaphragm with a following fifth lens group, which has positive refractive power, wherein before the diaphragm and after the diaphragm a respective meniscus lens curved toward the object is arranged. 。。。。。。
