Abstract p1']+4r%
Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. L Jw y,-
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Inventors: Rostalski, Hans-Juergen; (Berlin, DE) ; Schuster, Karl-Heinz; (Koenigsbronn, DE) ; Hudyma, Russell; (San Ramon, CA) ; Ulrich, Wilhelm; (Aalen, DE) ; Freimann, Rolf; (Aalen, DE) G4,.kK
Correspondence Name and Address: SUGHRUE MION, PLLC ?hOv Y)
2100 PENNSYLVANIA AVENUE, N.W. bqwn_=.
SUITE 800 G7YBo4v
WASHINGTON We@wN:
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20037 'EO"0,
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Assignee Name and Adress: CARL ZEISS SMT AG ZJ%iiY
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Serial No.: 931051 mc|8t0+1`
Series Code: 10 om1D} irKT
Filed: September 1, 2004 ~kOXMLRg
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U.S. Current Class: 359/649 O6b. oS '-
U.S. Class at Publication: 359/649 j|IvDrm#
Intern'l Class: G02B 003/00; G02B 009/00 8S@"6TG`
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Foreign Application Data 8.tp#x,A
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Date Code Application Number 7, 2#0Z`ge
Sep 12, 2003 WO 03/075049 A2 %5 Zhq >
Feb 6, 2003 WO PCT/EP03/01147 .tzQ
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Sep 12, 2003 WO 03/075096 A2 ;*>':-4
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Claims w!/|aZ~*
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1. A refractive projection objective for microlithography with a numerical aperture NA greater than 0.7, consisting of: a first lens group immediately following an object plane of the projection objective and having negative refractive power; a second lens group immediately following the first lens group and having positive refractive power; a third lens group immediately following the second lens group and having negative refractive power for generating a constriction of a light beam passing through the projection objective; a fourth lens group immediately following the third lens group and having positive refractive power; and a fifth lens group immediately following the fourth lens group and having positive refractive power; the projection objective thereby consisting of a first convexity, a second convexity, and a waist arranged between the first and second convexity, wherein the first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. RsnFjf b'
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2. A refractive projection objective according to claim 1, wherein the following relationship of the maximum diameters holds: 0.9<D.sub.1/D.sub.2<1.0. `m \l#r 2C
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3. A refractive projection objective which, in the direction of propagation of the light, consists of a first lens group with negative refractive power, of a second lens group with positive refractive power, and of a third lens group with negative refractive power, for the provision of a constriction of the light beam, and of a following fourth lens group with positive refractive power, and of a system diaphragm with a following fifth lens group, which has positive refractive power, wherein before the diaphragm and after the diaphragm a respective meniscus lens curved toward the object is arranged. 。。。。。。
