Abstract = 2k+/0ZbP
Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. tP UQ "S
-------------------------------------------------------------------------------- >&TktQO_T
Inventors: Rostalski, Hans-Juergen; (Berlin, DE) ; Schuster, Karl-Heinz; (Koenigsbronn, DE) ; Hudyma, Russell; (San Ramon, CA) ; Ulrich, Wilhelm; (Aalen, DE) ; Freimann, Rolf; (Aalen, DE) er_aol e
Correspondence Name and Address: SUGHRUE MION, PLLC cb+!H>+
2100 PENNSYLVANIA AVENUE, N.W. @1pdyKK
SUITE 800 ^ZsME,
WASHINGTON 9: Y\D.M
DC REJ}T:
20037 3+Q6<MS
q
US Vo\d&}Q
* PZ=$>r
Assignee Name and Adress: CARL ZEISS SMT AG ZE9*i} r
Zqao4
Serial No.: 931051 E,;nx^`!l
Series Code: 10 *6 h.#$\
Filed: September 1, 2004 mb#)w`<
D -jew &B
U.S. Current Class: 359/649 ]Kf HuYjM
U.S. Class at Publication: 359/649 ?;$g, 2n
Intern'l Class: G02B 003/00; G02B 009/00 b `2~
GV9"8M Z6
-------------------------------------------------------------------------------- 6Hz=VhQrN
1F=x~FMvY
Foreign Application Data ELm#
k_ skn3,u
-------------------------------------------------------------------------------- Z d%*,\ `S
Date Code Application Number 33; yt d
Sep 12, 2003 WO 03/075049 A2 27M gwX
NQ
Feb 6, 2003 WO PCT/EP03/01147 d&fENnt?h
Sep 12, 2003 WO 03/075096 A2 P vtf_Qo^
fhC=MJ
@
-------------------------------------------------------------------------------- f _
::?
FnCHbPlb
Claims *33Zt+
6 2LZ}yn_"
-------------------------------------------------------------------------------- CV` I.
1. A refractive projection objective for microlithography with a numerical aperture NA greater than 0.7, consisting of: a first lens group immediately following an object plane of the projection objective and having negative refractive power; a second lens group immediately following the first lens group and having positive refractive power; a third lens group immediately following the second lens group and having negative refractive power for generating a constriction of a light beam passing through the projection objective; a fourth lens group immediately following the third lens group and having positive refractive power; and a fifth lens group immediately following the fourth lens group and having positive refractive power; the projection objective thereby consisting of a first convexity, a second convexity, and a waist arranged between the first and second convexity, wherein the first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. =IUTU4 !]
ur'A ;B
2. A refractive projection objective according to claim 1, wherein the following relationship of the maximum diameters holds: 0.9<D.sub.1/D.sub.2<1.0. /q> "">
0$UE|yDs>
3. A refractive projection objective which, in the direction of propagation of the light, consists of a first lens group with negative refractive power, of a second lens group with positive refractive power, and of a third lens group with negative refractive power, for the provision of a constriction of the light beam, and of a following fourth lens group with positive refractive power, and of a system diaphragm with a following fifth lens group, which has positive refractive power, wherein before the diaphragm and after the diaphragm a respective meniscus lens curved toward the object is arranged. 。。。。。。
