Abstract s;1]tD
Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. uNn[[LS
-------------------------------------------------------------------------------- \`, [ )`
Inventors: Rostalski, Hans-Juergen; (Berlin, DE) ; Schuster, Karl-Heinz; (Koenigsbronn, DE) ; Hudyma, Russell; (San Ramon, CA) ; Ulrich, Wilhelm; (Aalen, DE) ; Freimann, Rolf; (Aalen, DE) \}~s2Y5j
Correspondence Name and Address: SUGHRUE MION, PLLC wBQF~WY
2100 PENNSYLVANIA AVENUE, N.W. VyRsPg[(
SUITE 800 q %0Cg=
WASHINGTON G60R9y47c
DC Iyd?|f"
20037 '+
xu#R
US x!_<z''
,-+"^>
Assignee Name and Adress: CARL ZEISS SMT AG OEPa |rb
BS&;n
Serial No.: 931051 Dfd-^N!
Series Code: 10 A~Xq,BxCV
Filed: September 1, 2004 EZ.!rh~+
k 8,?hX:
U.S. Current Class: 359/649 l88A=iLgv
U.S. Class at Publication: 359/649 0wFH!s/B
Intern'l Class: G02B 003/00; G02B 009/00 3+J0!FVla
>a1{397Y}
-------------------------------------------------------------------------------- IScRsxFb
'xv8Gwf"
Foreign Application Data bS
>0DU
F`nb21{0y&
-------------------------------------------------------------------------------- Qm8) 4?FZ
Date Code Application Number N ~ g :Wf!
Sep 12, 2003 WO 03/075049 A2 | 3+m%;X
Feb 6, 2003 WO PCT/EP03/01147 Y F:2>w<
Sep 12, 2003 WO 03/075096 A2 [+w 3J#K
W$qd/'%
-------------------------------------------------------------------------------- y fSM
v(l eide
Claims YpUp@/"
"+?Cz !i
-------------------------------------------------------------------------------- hh~n#7w~IR
1. A refractive projection objective for microlithography with a numerical aperture NA greater than 0.7, consisting of: a first lens group immediately following an object plane of the projection objective and having negative refractive power; a second lens group immediately following the first lens group and having positive refractive power; a third lens group immediately following the second lens group and having negative refractive power for generating a constriction of a light beam passing through the projection objective; a fourth lens group immediately following the third lens group and having positive refractive power; and a fifth lens group immediately following the fourth lens group and having positive refractive power; the projection objective thereby consisting of a first convexity, a second convexity, and a waist arranged between the first and second convexity, wherein the first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. 8h<ehNX ^I
OzT#1T1'c
2. A refractive projection objective according to claim 1, wherein the following relationship of the maximum diameters holds: 0.9<D.sub.1/D.sub.2<1.0. =e><z9hY
Jdy <w&S
3. A refractive projection objective which, in the direction of propagation of the light, consists of a first lens group with negative refractive power, of a second lens group with positive refractive power, and of a third lens group with negative refractive power, for the provision of a constriction of the light beam, and of a following fourth lens group with positive refractive power, and of a system diaphragm with a following fifth lens group, which has positive refractive power, wherein before the diaphragm and after the diaphragm a respective meniscus lens curved toward the object is arranged. 。。。。。。
