Abstract @+~>utr
Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. wKpb%3
-------------------------------------------------------------------------------- /kw;q{>?o
Inventors: Rostalski, Hans-Juergen; (Berlin, DE) ; Schuster, Karl-Heinz; (Koenigsbronn, DE) ; Hudyma, Russell; (San Ramon, CA) ; Ulrich, Wilhelm; (Aalen, DE) ; Freimann, Rolf; (Aalen, DE) \1#]qs -
Correspondence Name and Address: SUGHRUE MION, PLLC }/\`'LQ
2100 PENNSYLVANIA AVENUE, N.W. C[jX;//Jiu
SUITE 800 +Q"~2_q5/;
WASHINGTON h-O;5.m-P
DC !Ea9
fe
20037 O# ):*II`9
US *_J{_7pwe
a[z $ae7
Assignee Name and Adress: CARL ZEISS SMT AG 3b#L*-
aO(iKlZ$
Serial No.: 931051 H2Z
e\c
Series Code: 10 O0
Uh
Filed: September 1, 2004 /s+IstW
g]N'6La
U.S. Current Class: 359/649 2 A";o E
U.S. Class at Publication: 359/649 KXl!VD,#`=
Intern'l Class: G02B 003/00; G02B 009/00 9c*B%A8J
MwQ4&z#wh
-------------------------------------------------------------------------------- Pw +nO
x@/:{B
Foreign Application Data y3j"vKG
E
y9rH _
-------------------------------------------------------------------------------- 6ce-92n
Date Code Application Number |'P$z MAF
Sep 12, 2003 WO 03/075049 A2 imzPVGCD{
Feb 6, 2003 WO PCT/EP03/01147 ]a uqf
Sep 12, 2003 WO 03/075096 A2 qP&:9eL
~Ma r
-------------------------------------------------------------------------------- /J!:_Nq
#639N9a~
Claims 7hu7r WY`E
FIVC~LDd
-------------------------------------------------------------------------------- :?y Ma$
1. A refractive projection objective for microlithography with a numerical aperture NA greater than 0.7, consisting of: a first lens group immediately following an object plane of the projection objective and having negative refractive power; a second lens group immediately following the first lens group and having positive refractive power; a third lens group immediately following the second lens group and having negative refractive power for generating a constriction of a light beam passing through the projection objective; a fourth lens group immediately following the third lens group and having positive refractive power; and a fifth lens group immediately following the fourth lens group and having positive refractive power; the projection objective thereby consisting of a first convexity, a second convexity, and a waist arranged between the first and second convexity, wherein the first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. Fsx<Sa
cPAR.h,b?
2. A refractive projection objective according to claim 1, wherein the following relationship of the maximum diameters holds: 0.9<D.sub.1/D.sub.2<1.0. }a9G,@:k
u3,O)[qV
3. A refractive projection objective which, in the direction of propagation of the light, consists of a first lens group with negative refractive power, of a second lens group with positive refractive power, and of a third lens group with negative refractive power, for the provision of a constriction of the light beam, and of a following fourth lens group with positive refractive power, and of a system diaphragm with a following fifth lens group, which has positive refractive power, wherein before the diaphragm and after the diaphragm a respective meniscus lens curved toward the object is arranged. 。。。。。。
