Abstract $7#N@7
Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. #b~wIOR)Z
-------------------------------------------------------------------------------- t5%\`Yo ?
Inventors: Rostalski, Hans-Juergen; (Berlin, DE) ; Schuster, Karl-Heinz; (Koenigsbronn, DE) ; Hudyma, Russell; (San Ramon, CA) ; Ulrich, Wilhelm; (Aalen, DE) ; Freimann, Rolf; (Aalen, DE) 1-Fz#v7p
Correspondence Name and Address: SUGHRUE MION, PLLC " iCR68e
2100 PENNSYLVANIA AVENUE, N.W. J| orvnkK
SUITE 800 o4 )^U t+
WASHINGTON =ZsM[wd
DC yMQuM :d
20037 N}Ol`@@#h
US x,s Ma*vd
H$:Z`CQt<
Assignee Name and Adress: CARL ZEISS SMT AG 8-N8v
*0
nt /+?Sj
Serial No.: 931051 `Z3Qx~f x
Series Code: 10 /\%K7\
Filed: September 1, 2004 b6IY o!3
{[~
!6&2(k
U.S. Current Class: 359/649 +TzF*Np
U.S. Class at Publication: 359/649 )\:cL GM
Intern'l Class: G02B 003/00; G02B 009/00 Pez 7HKW:
C-;y#a)
-------------------------------------------------------------------------------- TJ:B_F*bSk
>H@
z P8
Foreign Application Data (c /H$'
&S}i)Nu 6J
-------------------------------------------------------------------------------- hcw)qB,s
Date Code Application Number
uC3o@qGW<
Sep 12, 2003 WO 03/075049 A2 cxTP4\T\E
Feb 6, 2003 WO PCT/EP03/01147 8{5Y%InL
Sep 12, 2003 WO 03/075096 A2 n7 RswX
U _~lpu
-------------------------------------------------------------------------------- zMfr`&%e
UFxQ-GV4
Claims P@Wi^svj
x%ZgLvdp,
-------------------------------------------------------------------------------- U!:Q|':=h
1. A refractive projection objective for microlithography with a numerical aperture NA greater than 0.7, consisting of: a first lens group immediately following an object plane of the projection objective and having negative refractive power; a second lens group immediately following the first lens group and having positive refractive power; a third lens group immediately following the second lens group and having negative refractive power for generating a constriction of a light beam passing through the projection objective; a fourth lens group immediately following the third lens group and having positive refractive power; and a fifth lens group immediately following the fourth lens group and having positive refractive power; the projection objective thereby consisting of a first convexity, a second convexity, and a waist arranged between the first and second convexity, wherein the first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. }]pq&v!
ta>:iQ a
2. A refractive projection objective according to claim 1, wherein the following relationship of the maximum diameters holds: 0.9<D.sub.1/D.sub.2<1.0. a!,q\p8<t0
d}K"dr:W5
3. A refractive projection objective which, in the direction of propagation of the light, consists of a first lens group with negative refractive power, of a second lens group with positive refractive power, and of a third lens group with negative refractive power, for the provision of a constriction of the light beam, and of a following fourth lens group with positive refractive power, and of a system diaphragm with a following fifth lens group, which has positive refractive power, wherein before the diaphragm and after the diaphragm a respective meniscus lens curved toward the object is arranged. 。。。。。。
