Abstract bfz7t!A)A
Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. x>EL|Q=?
-------------------------------------------------------------------------------- $f3 IO#N
Inventors: Rostalski, Hans-Juergen; (Berlin, DE) ; Schuster, Karl-Heinz; (Koenigsbronn, DE) ; Hudyma, Russell; (San Ramon, CA) ; Ulrich, Wilhelm; (Aalen, DE) ; Freimann, Rolf; (Aalen, DE) h<%$?h+}
Correspondence Name and Address: SUGHRUE MION, PLLC V>QyiB
2100 PENNSYLVANIA AVENUE, N.W. n3~axRPO
SUITE 800 bp9RF
d{
WASHINGTON DW7E ]o
DC h-ii-c?R@0
20037 T)I)r239h
US L&k CI`Tb
>S:(BJMo
Assignee Name and Adress: CARL ZEISS SMT AG }2; P`s
0R)x"4Ww
Serial No.: 931051 \o[][R#D
Series Code: 10 nvrh7l9nX
Filed: September 1, 2004 ZXb|3|D
2 @tnOs(*
U.S. Current Class: 359/649 5T#v &
U.S. Class at Publication: 359/649 &q<k0_5Q
Intern'l Class: G02B 003/00; G02B 009/00 =|i_T%a
k)I4m.0a5
-------------------------------------------------------------------------------- e}?Q&Lci
|-V:#1wR.]
Foreign Application Data ( 5! '42
nU j`#%
-------------------------------------------------------------------------------- U_IGL
Date Code Application Number {FFdMdxy-
Sep 12, 2003 WO 03/075049 A2 UPGUJ>2Z
Feb 6, 2003 WO PCT/EP03/01147 ]Y I9
Sep 12, 2003 WO 03/075096 A2 L/jaUt[,
;B 8Q,.t>x
-------------------------------------------------------------------------------- Z4/D 38_
gV.? Myy
Claims \|S%zX
q{&c?l*2
-------------------------------------------------------------------------------- 5{b;wLi$X2
1. A refractive projection objective for microlithography with a numerical aperture NA greater than 0.7, consisting of: a first lens group immediately following an object plane of the projection objective and having negative refractive power; a second lens group immediately following the first lens group and having positive refractive power; a third lens group immediately following the second lens group and having negative refractive power for generating a constriction of a light beam passing through the projection objective; a fourth lens group immediately following the third lens group and having positive refractive power; and a fifth lens group immediately following the fourth lens group and having positive refractive power; the projection objective thereby consisting of a first convexity, a second convexity, and a waist arranged between the first and second convexity, wherein the first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. phH@{mI
4ekwmw (ox
2. A refractive projection objective according to claim 1, wherein the following relationship of the maximum diameters holds: 0.9<D.sub.1/D.sub.2<1.0. "e"#k}z9
rNV3-#kU
3. A refractive projection objective which, in the direction of propagation of the light, consists of a first lens group with negative refractive power, of a second lens group with positive refractive power, and of a third lens group with negative refractive power, for the provision of a constriction of the light beam, and of a following fourth lens group with positive refractive power, and of a system diaphragm with a following fifth lens group, which has positive refractive power, wherein before the diaphragm and after the diaphragm a respective meniscus lens curved toward the object is arranged. 。。。。。。
