Abstract &N{XLg>
Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. ,W"[q ~
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Inventors: Rostalski, Hans-Juergen; (Berlin, DE) ; Schuster, Karl-Heinz; (Koenigsbronn, DE) ; Hudyma, Russell; (San Ramon, CA) ; Ulrich, Wilhelm; (Aalen, DE) ; Freimann, Rolf; (Aalen, DE) 8pc=Oor2Tv
Correspondence Name and Address: SUGHRUE MION, PLLC !,rp|
2100 PENNSYLVANIA AVENUE, N.W. xWY%-CWY.
SUITE 800 ;\N{z6
WASHINGTON "3kIQsD|j
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Assignee Name and Adress: CARL ZEISS SMT AG ar-N4+!@
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Serial No.: 931051 d ] J5c
Series Code: 10 ZK =`Y@
Filed: September 1, 2004 k"*A@
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U.S. Current Class: 359/649 d!+8
U.S. Class at Publication: 359/649 [:cy.K!Uo%
Intern'l Class: G02B 003/00; G02B 009/00 h J*2q"
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Foreign Application Data !Cq2<[K#
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Date Code Application Number 1#KE4(
Sep 12, 2003 WO 03/075049 A2 ?:D#\4=US
Feb 6, 2003 WO PCT/EP03/01147 )<_e{_ h
Sep 12, 2003 WO 03/075096 A2 SE%B&8ZD
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Claims -+^E5
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1. A refractive projection objective for microlithography with a numerical aperture NA greater than 0.7, consisting of: a first lens group immediately following an object plane of the projection objective and having negative refractive power; a second lens group immediately following the first lens group and having positive refractive power; a third lens group immediately following the second lens group and having negative refractive power for generating a constriction of a light beam passing through the projection objective; a fourth lens group immediately following the third lens group and having positive refractive power; and a fifth lens group immediately following the fourth lens group and having positive refractive power; the projection objective thereby consisting of a first convexity, a second convexity, and a waist arranged between the first and second convexity, wherein the first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. vbH?[ Zr ?
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2. A refractive projection objective according to claim 1, wherein the following relationship of the maximum diameters holds: 0.9<D.sub.1/D.sub.2<1.0. 8UH
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3. A refractive projection objective which, in the direction of propagation of the light, consists of a first lens group with negative refractive power, of a second lens group with positive refractive power, and of a third lens group with negative refractive power, for the provision of a constriction of the light beam, and of a following fourth lens group with positive refractive power, and of a system diaphragm with a following fifth lens group, which has positive refractive power, wherein before the diaphragm and after the diaphragm a respective meniscus lens curved toward the object is arranged. 。。。。。。
