Abstract ETO$9}x[
Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. 5,R`@&K3D
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Inventors: Rostalski, Hans-Juergen; (Berlin, DE) ; Schuster, Karl-Heinz; (Koenigsbronn, DE) ; Hudyma, Russell; (San Ramon, CA) ; Ulrich, Wilhelm; (Aalen, DE) ; Freimann, Rolf; (Aalen, DE) =JW[pRI5a
Correspondence Name and Address: SUGHRUE MION, PLLC L,$3Yj
2100 PENNSYLVANIA AVENUE, N.W. J(e7{aRJ9
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Assignee Name and Adress: CARL ZEISS SMT AG ZdH1nX(Yh3
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Serial No.: 931051 76bc]o#
Series Code: 10 AF$\WWr B
Filed: September 1, 2004 G6Nb{m
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U.S. Current Class: 359/649 4, ~tl~FD
U.S. Class at Publication: 359/649 )xt4Wk/
Intern'l Class: G02B 003/00; G02B 009/00 EnJ!mr
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Foreign Application Data `Wn Q
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Date Code Application Number L/i( KF{
Sep 12, 2003 WO 03/075049 A2 *_"u)<J
Feb 6, 2003 WO PCT/EP03/01147 4pPI'd&/7
Sep 12, 2003 WO 03/075096 A2 X;!~<~@ Y
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Claims QVtM.oi!Q
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1. A refractive projection objective for microlithography with a numerical aperture NA greater than 0.7, consisting of: a first lens group immediately following an object plane of the projection objective and having negative refractive power; a second lens group immediately following the first lens group and having positive refractive power; a third lens group immediately following the second lens group and having negative refractive power for generating a constriction of a light beam passing through the projection objective; a fourth lens group immediately following the third lens group and having positive refractive power; and a fifth lens group immediately following the fourth lens group and having positive refractive power; the projection objective thereby consisting of a first convexity, a second convexity, and a waist arranged between the first and second convexity, wherein the first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. Im)EDTm$
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2. A refractive projection objective according to claim 1, wherein the following relationship of the maximum diameters holds: 0.9<D.sub.1/D.sub.2<1.0. d#>y }H9
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3. A refractive projection objective which, in the direction of propagation of the light, consists of a first lens group with negative refractive power, of a second lens group with positive refractive power, and of a third lens group with negative refractive power, for the provision of a constriction of the light beam, and of a following fourth lens group with positive refractive power, and of a system diaphragm with a following fifth lens group, which has positive refractive power, wherein before the diaphragm and after the diaphragm a respective meniscus lens curved toward the object is arranged. 。。。。。。
