Abstract eJ@~o{,?>
Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. Q[u6|jRt
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Inventors: Rostalski, Hans-Juergen; (Berlin, DE) ; Schuster, Karl-Heinz; (Koenigsbronn, DE) ; Hudyma, Russell; (San Ramon, CA) ; Ulrich, Wilhelm; (Aalen, DE) ; Freimann, Rolf; (Aalen, DE) [V}, tO|
Correspondence Name and Address: SUGHRUE MION, PLLC Da1aI]{I
2100 PENNSYLVANIA AVENUE, N.W. Xm!-~n@-m7
SUITE 800 diT=x52
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Assignee Name and Adress: CARL ZEISS SMT AG 6lFfS!ZFA
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Serial No.: 931051 =xN= #
Series Code: 10 n1v5Q2xw
Filed: September 1, 2004 L
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U.S. Current Class: 359/649 S4o$t -9l
U.S. Class at Publication: 359/649 svhI3 "r
Intern'l Class: G02B 003/00; G02B 009/00 ko\) :DN
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Foreign Application Data ,xi({{ L*
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Date Code Application Number HIvZQQW|
Sep 12, 2003 WO 03/075049 A2 {MBTP;{*~
Feb 6, 2003 WO PCT/EP03/01147 MgMD\
Sep 12, 2003 WO 03/075096 A2 b^CNV do'
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Claims nms8@[4-
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1. A refractive projection objective for microlithography with a numerical aperture NA greater than 0.7, consisting of: a first lens group immediately following an object plane of the projection objective and having negative refractive power; a second lens group immediately following the first lens group and having positive refractive power; a third lens group immediately following the second lens group and having negative refractive power for generating a constriction of a light beam passing through the projection objective; a fourth lens group immediately following the third lens group and having positive refractive power; and a fifth lens group immediately following the fourth lens group and having positive refractive power; the projection objective thereby consisting of a first convexity, a second convexity, and a waist arranged between the first and second convexity, wherein the first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. chI.{Rj
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2. A refractive projection objective according to claim 1, wherein the following relationship of the maximum diameters holds: 0.9<D.sub.1/D.sub.2<1.0. 6p;m\
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3. A refractive projection objective which, in the direction of propagation of the light, consists of a first lens group with negative refractive power, of a second lens group with positive refractive power, and of a third lens group with negative refractive power, for the provision of a constriction of the light beam, and of a following fourth lens group with positive refractive power, and of a system diaphragm with a following fifth lens group, which has positive refractive power, wherein before the diaphragm and after the diaphragm a respective meniscus lens curved toward the object is arranged. 。。。。。。
