Abstract 8@/]ki `>
Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. - ^;G^Uq6=
-------------------------------------------------------------------------------- e 9q/[xMi
Inventors: Rostalski, Hans-Juergen; (Berlin, DE) ; Schuster, Karl-Heinz; (Koenigsbronn, DE) ; Hudyma, Russell; (San Ramon, CA) ; Ulrich, Wilhelm; (Aalen, DE) ; Freimann, Rolf; (Aalen, DE) tZ=BK :39\
Correspondence Name and Address: SUGHRUE MION, PLLC q[q#cY:0
2100 PENNSYLVANIA AVENUE, N.W. ag?@5q3J}
SUITE 800 ( ^9q7)n
WASHINGTON bsPw Tp^
DC qEf )TW(
20037 'mug,jM
US ix]3 t^
89@89-_mC
Assignee Name and Adress: CARL ZEISS SMT AG i2$U##-ro]
z 0HCmj9T
Serial No.: 931051 H U$:x"AW
Series Code: 10 ,q/K&'0`
Filed: September 1, 2004 CQ"IL;y
+&a2aEXF
U.S. Current Class: 359/649 *=S\jek
U.S. Class at Publication: 359/649 S,3e|-&$
Intern'l Class: G02B 003/00; G02B 009/00 _:M6~XHo
*D,+v!wG9
-------------------------------------------------------------------------------- xvjHGgWSxc
Cz?N[dh h
Foreign Application Data X\
\\RCp
ui7 0|
-------------------------------------------------------------------------------- \9i.dF
Date Code Application Number $1\<>sJH
Sep 12, 2003 WO 03/075049 A2 oz kN&0
Feb 6, 2003 WO PCT/EP03/01147 +tkd($//
Sep 12, 2003 WO 03/075096 A2 F!`.y7hY@
0V}vVAa(B
-------------------------------------------------------------------------------- n1uJQt
\(Zdd
\,
Claims Y: KB"H
.(CzsupY_q
-------------------------------------------------------------------------------- zmf5!77
1. A refractive projection objective for microlithography with a numerical aperture NA greater than 0.7, consisting of: a first lens group immediately following an object plane of the projection objective and having negative refractive power; a second lens group immediately following the first lens group and having positive refractive power; a third lens group immediately following the second lens group and having negative refractive power for generating a constriction of a light beam passing through the projection objective; a fourth lens group immediately following the third lens group and having positive refractive power; and a fifth lens group immediately following the fourth lens group and having positive refractive power; the projection objective thereby consisting of a first convexity, a second convexity, and a waist arranged between the first and second convexity, wherein the first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. ) Ah
?_W "=WpC
2. A refractive projection objective according to claim 1, wherein the following relationship of the maximum diameters holds: 0.9<D.sub.1/D.sub.2<1.0. ;csAhkf:S
5&2=;?EO
3. A refractive projection objective which, in the direction of propagation of the light, consists of a first lens group with negative refractive power, of a second lens group with positive refractive power, and of a third lens group with negative refractive power, for the provision of a constriction of the light beam, and of a following fourth lens group with positive refractive power, and of a system diaphragm with a following fifth lens group, which has positive refractive power, wherein before the diaphragm and after the diaphragm a respective meniscus lens curved toward the object is arranged. 。。。。。。
