Abstract `2o/W]SSk
Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. ullq}}
-------------------------------------------------------------------------------- Aq^ 1(-g
Inventors: Rostalski, Hans-Juergen; (Berlin, DE) ; Schuster, Karl-Heinz; (Koenigsbronn, DE) ; Hudyma, Russell; (San Ramon, CA) ; Ulrich, Wilhelm; (Aalen, DE) ; Freimann, Rolf; (Aalen, DE) j\P47q'v#
Correspondence Name and Address: SUGHRUE MION, PLLC r\F`xtR(
2100 PENNSYLVANIA AVENUE, N.W. S =U*is
SUITE 800 XTG*56IzL
WASHINGTON 1Yo9Wf;vP
DC p,* rVz[Y
20037 ?}D@{%O3T
US od"Oq?~/t
GO.mT/rB
Assignee Name and Adress: CARL ZEISS SMT AG b%2+g<UKh
;_@u@$=~
Serial No.: 931051 Hq?-e?Nc
Series Code: 10 * 8CI'UX
Filed: September 1, 2004 fLa 7d?4
; dPyhR
U.S. Current Class: 359/649 r{pTM cDS
U.S. Class at Publication: 359/649 I0h/x5
Intern'l Class: G02B 003/00; G02B 009/00 4yV}4 f$q
1mz;4xb
-------------------------------------------------------------------------------- U]riBlg>
| 2,u!{
Foreign Application Data 8{Bcl 5]<
zqh.U @
-------------------------------------------------------------------------------- B<S uNbR
Date Code Application Number ycg5S rg
Sep 12, 2003 WO 03/075049 A2 G1K5J`"*
Feb 6, 2003 WO PCT/EP03/01147 iq)4/3"6
Sep 12, 2003 WO 03/075096 A2 h.g j4/g
Wf^6:
-------------------------------------------------------------------------------- ~e~iCyW;S
.S>:-j'u
Claims c |
&> tmzlww
-------------------------------------------------------------------------------- cs `T7?>
1. A refractive projection objective for microlithography with a numerical aperture NA greater than 0.7, consisting of: a first lens group immediately following an object plane of the projection objective and having negative refractive power; a second lens group immediately following the first lens group and having positive refractive power; a third lens group immediately following the second lens group and having negative refractive power for generating a constriction of a light beam passing through the projection objective; a fourth lens group immediately following the third lens group and having positive refractive power; and a fifth lens group immediately following the fourth lens group and having positive refractive power; the projection objective thereby consisting of a first convexity, a second convexity, and a waist arranged between the first and second convexity, wherein the first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1.
k_
9 gMO
p&/}0eL y
2. A refractive projection objective according to claim 1, wherein the following relationship of the maximum diameters holds: 0.9<D.sub.1/D.sub.2<1.0. 2 1. ;lj
Xp"ZK=r
3. A refractive projection objective which, in the direction of propagation of the light, consists of a first lens group with negative refractive power, of a second lens group with positive refractive power, and of a third lens group with negative refractive power, for the provision of a constriction of the light beam, and of a following fourth lens group with positive refractive power, and of a system diaphragm with a following fifth lens group, which has positive refractive power, wherein before the diaphragm and after the diaphragm a respective meniscus lens curved toward the object is arranged. 。。。。。。
