Abstract m*A b<$y
Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. 6p*X8j3p W
-------------------------------------------------------------------------------- #qY gQ<TM!
Inventors: Rostalski, Hans-Juergen; (Berlin, DE) ; Schuster, Karl-Heinz; (Koenigsbronn, DE) ; Hudyma, Russell; (San Ramon, CA) ; Ulrich, Wilhelm; (Aalen, DE) ; Freimann, Rolf; (Aalen, DE) s_XCKhN:
Correspondence Name and Address: SUGHRUE MION, PLLC vt2.
i$u
2100 PENNSYLVANIA AVENUE, N.W. }DS%?6}Sy
SUITE 800 GDSXBa*7
WASHINGTON cWZITT{A
DC |oLG c!i
20037 4
ZnQpKg
US GdI,&| /
j?m(l,YD|*
Assignee Name and Adress: CARL ZEISS SMT AG "aF2:E'
gac31,gH
Serial No.: 931051 QK[^G6TI
Series Code: 10 ^tGAJ_b 79
Filed: September 1, 2004 cZ| * Zpk
$cHU ,
U.S. Current Class: 359/649 oI/_WY[t
U.S. Class at Publication: 359/649 ''@Tke3IG6
Intern'l Class: G02B 003/00; G02B 009/00 w01[oU$x=
I3Z?xsa@Z
-------------------------------------------------------------------------------- hmGlGc,lf
oo\^}jb
Foreign Application Data N,-C+r5}<4
U&1 O
-------------------------------------------------------------------------------- //BJaWq
Date Code Application Number l`zh Kj
Sep 12, 2003 WO 03/075049 A2 3 0[Xkz
Feb 6, 2003 WO PCT/EP03/01147 9 d a=q
Sep 12, 2003 WO 03/075096 A2 Os-Z_zSl6
T&d Njx
-------------------------------------------------------------------------------- A;Y~Hu4KPZ
<q$Tk ,
Claims ~*/ >8R(Y
mMwV5\(
-------------------------------------------------------------------------------- Awxm[:r> ^
1. A refractive projection objective for microlithography with a numerical aperture NA greater than 0.7, consisting of: a first lens group immediately following an object plane of the projection objective and having negative refractive power; a second lens group immediately following the first lens group and having positive refractive power; a third lens group immediately following the second lens group and having negative refractive power for generating a constriction of a light beam passing through the projection objective; a fourth lens group immediately following the third lens group and having positive refractive power; and a fifth lens group immediately following the fourth lens group and having positive refractive power; the projection objective thereby consisting of a first convexity, a second convexity, and a waist arranged between the first and second convexity, wherein the first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. fc@<' -VA
J FnE{
2. A refractive projection objective according to claim 1, wherein the following relationship of the maximum diameters holds: 0.9<D.sub.1/D.sub.2<1.0. s 0Uid&qE
9)v]jk
3. A refractive projection objective which, in the direction of propagation of the light, consists of a first lens group with negative refractive power, of a second lens group with positive refractive power, and of a third lens group with negative refractive power, for the provision of a constriction of the light beam, and of a following fourth lens group with positive refractive power, and of a system diaphragm with a following fifth lens group, which has positive refractive power, wherein before the diaphragm and after the diaphragm a respective meniscus lens curved toward the object is arranged. 。。。。。。
