SYNOPSYS光学设计软件中的光线控制语法如下: N/1xc1$SB
AANT mnw(x#%P
M tar wt {A/S/MUL/DIV} {icol/P} name hbar xen yen gbar surf |oQhtk8.
END JdUI:(
|h&okR+_,
*|cs_,3
name: xCyD0^KY
YA YC YP XA XC XP ZA OPD OPP ZZ HH MlLM
$Y-@
XL YL ZL XG YG ZG XE YE ZE ZZL HHL ZZG HHG y'<5P~W!a
DSLOPE UNI FLUX PL DYrci?8Ith
HFREQ HEFFIC HSFREQ ERROR 2_Zn?#G8dl
OPL ... jsss jsps iQgr8[
SFf
Gz--C(
例如: @wVDe\% ,
M 0 1 A P YA 0 0 1 ! 0视场的边缘光线控制为 0 kX*.BZI}C
Gs4t6+Al
WopA7J,
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