[论文]Measuring the angles and pyramidal error of high-precision prisms [复制链接]

Measuring the angles and pyramidal error of high-precision prisms S^zt>  
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High-precision prisms, having maximum angle tolerances X
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of 1 to 3 arcsec, find increasing application in optical metrology. "NMSLqO  
Reported interferometric techniques for measuring \Ctl(uj  
the wedge angles of such prisms achieve a precision of up DKG99biJN  
to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques !5VT[w 1  
have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric jqJ't)N  
methods have made use of goniometers,2 QIWfGVc-  
spectrometers,3 master prisms,4,5 and collimators.6 However, TGSkJ 1Lx  
in the literature there are few reported methods for n#dvBK0M  
measuring the pyramidal error, and the majority rely on NGs@z^&V  
visual observation,2,7,8 by which it is only possible to measure aS3Fvk0R{h  
pyramidal errors to the order of 1 arcmin ~Ref. 8!. >s;>"]  
In the new arrangement presented here, one can measure bMvHAtp  
the prism angle and the pyramidal error separately or in R[bI4|t  
combination. This is possible because the measurements [+2iwfD  
are made simultaneously but with different techniques.