资源里面,介绍光刻的比较少, 今天分享一本最新介绍光刻技术的英文教材Optical Lithography - Here is Why - B J Lin 2010 ys7Tq+
Contents z'gJy
Preface .................................................................................................... i"4;{C{s
Chapter 1 Introducing Optical Lithography R"z}q(O:
Chapter 2 Exposure Systems ,WoV)L'?
Chapter 3 Image Formation H>-{.E1bG
Chapter 4 The Metrics of Lithography E 429<LQI/
Chapter 5 Components in Optical Lithography #B_H/9f(
Chapter 6 Processing and Optimization mK^E@uxN
Chapter 7 Immersion Lithography }%y5<n*v\
Chapter 8 Outlook and Successors to Optical Lithography