资源里面,介绍光刻的比较少, 今天分享一本最新介绍光刻技术的英文教材Optical Lithography - Here is Why - B J Lin 2010 IQtQf_"e1
Contents 73.+0x
Preface .................................................................................................... Cd=$XJ-b
Chapter 1 Introducing Optical Lithography DUl+Jqn4B
Chapter 2 Exposure Systems !03JA 9lo
Chapter 3 Image Formation N\Lu+ x5
Chapter 4 The Metrics of Lithography OaY89ko
Chapter 5 Components in Optical Lithography PH:5
Chapter 6 Processing and Optimization {D..(f1*u
Chapter 7 Immersion Lithography y9/nkF1p
Chapter 8 Outlook and Successors to Optical Lithography