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法国开发出下一代中红外光学化学传感器  中红外化学传感器工作的光谱范围为2.5～12 um，被认为是创新硅光子器件的最前沿。在不到十年的时间里，由于光谱学、材料加工、化学和生物分子传感、以及安全和工业应用的潜力日益增长，化学传感已经成为这些器件的关键应用之一。  中红外光谱范围内的测量可提供高选择性、高灵敏且明确的化学品识别能力。 CEA-Leti这款硬币大小的片上传感器原型结合了高性能和低功耗的特点，已经为物联网应用做好了准备，可应用于多种消费类应用，例如智能家居和车辆空气质量监测，以及可穿戴健康应用等。其工业用途包括实时空气质量监测和广泛的工人安全应用。 目前市场上的中红外光学传感器通常体积大且昂贵。同时，小型化和廉价的传感器又无法满足消费类应用对精度、选择性和灵敏度的要求。 虽然尺寸和价格不是工业应用最关键的问题，但笨重且昂贵的光学传感器是消费类应用的主要障碍，因为消费类应用需要在各种便携式设备中实现可穿戴和集成。 “中红外硅光子技术已经构建了一类新的集成元件，实现了化学传感所需要的主要构建模块的芯片级集成，”Sergio Nicoletti说。Nicoletti是CEA-Leti在2019美国西部光电展(SPIE Photonics West 2019)上发布的《硅上中红外传感器微型化：挑战与展望》论文的第一作者。 CEA-Leti的这项突破结合了制造片上光学化学传感器所需要的三项现有技术：在硅片上集成中红外激光器;开发中红外波长范围的光子集成电路(PIC);以及硅芯片上光声探测器的微型化。 “虽然其他研发工作也有取得了类似的成果，但我们项目的主要成就在于采用了IC和MEMS产业典型的设备和工艺，”Nicoletti说，“我们对架构和工艺选择的重点关注，以及一系列步骤的特定联系，对于开发这种光学化学传感器也至关重要，CEA-Leti现在已将其作为演示原型实现了。” 关键词： 传感器
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copland 2019-02-17 19:46法国开发出下一代中红外光学化学传感器
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optik18 2019-02-17 21:59下一代光学化学传感器，可期。
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mang2004 2019-02-17 23:21SPIE 2019 Silicon Photonics XIV 发表的摘要：
Miniaturization of mid-IR sensors on Si: challenges and perspectives
Author(s): Sergio Nicoletti, Jean-Marc Fédéli, Maryse Fournier, Pierre Labeye, Pierre Barritault, Adrien Marchant, Alain Glière, Alexandre Teulle, Jean-Guillaume Coutard, Laurent Duraffourg, CEA-LETI-DOPT (France), Univ. Grenoble Alpes (France)
Abstract : The Mid-IR spectral range (2.5 µm up to 12 µm) has been considered as the paradigm for innovative silicon photonic devices. In less than a decade, chemical sensing has become a key application for Mid-IR silicon photonic devices because of the growing potential in spectroscopy, materials processing, chemical and biomolecular sensing, security and industry applications. Measuring in this spectral range, usually called molecule fingerprint region, allows to address a unique combination of fundamental absorption bands orders of magnitude stronger than overtone and combination bands in the near IR. This feature provides highly selective, sensitive and unequivocal identification of the chemicals. Progress in Cascade Laser technology (QCL & ICL) allows to select emission wavelengths suitable to target the detection of specific chemicals. With these sources, novel spectroscopic tools allowing real-time in-situ detection of gasses down to traces are nowadays commercially available. Mid-IR Si photonics has developed a novel class of integrated components leading to the integration at chip level of the main building blocks required for chemical sensing, i.e. the source, the PICs and the detector. Three main directions of improvement can be drawn: i) extend the range of wavelengths available from a single source, ii) move beam handling and routing from discrete optics to PICs and iii) investigate detection schemes for a fully integrated on-chip sensing. This paper reviews recent key achievements in the miniaturization and the co-integration of photonics devices at chip and packaging level to address cost, size and power consumption. Perspectives on potential applications will also be presented.
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未来天气 2021-03-24 13:5212μm不是远红外了吗？