Abstract T8&
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Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. $2Y'[Dto\
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Inventors: Rostalski, Hans-Juergen; (Berlin, DE) ; Schuster, Karl-Heinz; (Koenigsbronn, DE) ; Hudyma, Russell; (San Ramon, CA) ; Ulrich, Wilhelm; (Aalen, DE) ; Freimann, Rolf; (Aalen, DE) 1!,xB]v1Ri
Correspondence Name and Address: SUGHRUE MION, PLLC t]|WRQvy8
2100 PENNSYLVANIA AVENUE, N.W. !|hxr#q=4
SUITE 800 LAG*H
WASHINGTON o2e aSG
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20037 b/IT8Cm3
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Assignee Name and Adress: CARL ZEISS SMT AG Xx_v>Jn!
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Serial No.: 931051 5)fEs.r0U
Series Code: 10 C$o#zu q-
Filed: September 1, 2004 s&