SYNOPSYS中
光栅表面输入格式:
G+sB/l" SN GRATING {X/Y} L/MM ORDER CWAV HIN VNUM kz1Z K 其中,X-衍射发生在X-Z平面;Y-衍射发生在Y-Z平面。L/MM-给出了光栅刻线数;ORDER-衍射级次;CWAV-波长;HIN-基底
折射率;
v@2?X4n VNUM-相应的阿贝数;
$B>L_~cS 8KP 例子:
bg9_$laDi RLE
( Ygy%O% ID GRATING_REAL FLAT
H.n|zGQTB WAVL .6000000 .5000000 .4000000
/L$q8 + APS 1
p+Bvfn POLARIZATION LINEAR Y
V^.Z&7+E`_ UNITS MM
jMR9E@>~E OBB 0.000000 10.00000 1.00000 0.00000 0.00000 0.00000 1.00000
?OO !M 0 AIR
vcy+p]6KE- 1 GRA Y 500.0000 -1 0.500000 1.500000 50.000000
7~MWp4. 2 COATING PERF
Z'^.H3YvL 2 CV 0.0000000000000 TH 1.00000000E-06
$1 Z3yb^
2 N1 1.51628919 N2 1.52140818 N3 1.53084089
3e;K5qSeo/ 2 CTE 0.710000E-05
86&r;c: 2 GTB S 'BK7 '
|SJ%Myy 3 COATING PERF
I[ZWOi\-
; 3 CV 0.0000000000000 TH 100.00000000 AIR
]%Whtj.,x7 3 AIR
N9Fu 4 CV 0.0000000000000 TH 0.00000000 AIR
K}S=f\Q] 4 AIR
mp]UUpt END
lQ.3_{"s <&M5#:u PER 0 0 0 0 0
).C>>1ZC PLOT
K,HR=5 PUPIL 2 1 5
+w3k_^X9c RED
97!VH>MX TRACE
1 0 0 5
qp1rP# PUPIL 2 1 5
{-5b[m( LIME
A56aOI= TRACE
2 0 0 5
K)8 m?sf/ PUPIL 2 1 5
!. ={p8X-x BLUE
U./1OZ& TRACE
3 0 0 5
q/tC/V%@( END
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