摘要:微纳光学结构技术是指通过在材料中引入微纳光学结构,实现新型光学功能器件。其中表面等离子体光学、人工负折射率材料、隐身结构,都是通过引入微纳结构控制光的衍射和传播,从而实现新的光学性能。从这个角度来讲,微纳光学结构的设计和制造是微纳光学发展的共性关键技术问题,微纳光学是新型光电子产业的重要发展方向。 G a$2o6
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关键字:微纳光学 ;纳米制造;微纳光学产业; ,Cm1~ExJ
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Abstract: Micro-nano optical structure technology refers to through the introduction of micro-nano optical structure in the material, implement new optical functional devices. The surface plasmon optics, artificial negative refractive index materials, stealth structure, through the introduction of micro-nano structure control of light diffraction and transmission, so as to realize the new optical performance. From this perspective, micro-nano optical structure design and manufacture is the universal key technical problems in the development of micro-nano optics, micro-nano optics is a new important development direction of optoelectronic industry. =mwAbh)[7n
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Key words : micro-nano optics; nanofabrication; micro-nano optical industry $WW7,
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1.微纳光学技术的多种应用 y9i+EV
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1)加工新型光栅 .db:mSrL
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借助于大规模集成电路工艺技术,可以加工出新型的光栅。光栅是个实用性很强的基本光学器件,在23ARTICLE | 论文激光与光电子学进展2009.10光谱仪、光通信波分复用器件、激光聚变工程、光谱分析等领域中大量使用。传统的表面光栅不论是机械刻画光栅,还是全息光栅,其表面的光栅结构是很薄的。明胶或光折变体全息光栅的光栅厚度较厚,由于制造工艺的一致性、温度稳定性和长期稳定性问题,在实际应用时仍然有限制。 W`#E[g?]
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2)制作深刻蚀亚波长光栅 +:C.G[+
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