a0010085 |
2011-04-28 00:27 |
Optical Lithography - Here is Why - B J Lin 2010
资源里面,介绍光刻的比较少, 今天分享一本最新介绍光刻技术的英文教材Optical Lithography - Here is Why - B J Lin 2010 8%$Vj Contents G2nL#l~@) Preface .................................................................................................... C XQPbt[5 Chapter 1 Introducing Optical Lithography G*;}6 bj|? Chapter 2 Exposure Systems jQKlJi2xu Chapter 3 Image Formation ~)zoIM \ Chapter 4 The Metrics of Lithography ?Q`Sx Chapter 5 Components in Optical Lithography t ._PS3 Chapter 6 Processing and Optimization )m-l&UK Chapter 7 Immersion Lithography ;9{x"" Chapter 8 Outlook and Successors to Optical Lithography
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