| kmischina |
2010-03-05 16:38 |
断层面计测系统
Layer Profiling System C2/B1ba
The layer profiling system performs layer structural by generating tomographic images of specified cutting location from potical microscope images that are obtained by moving sequentially in the vertical direction. G&?,L:^t
Features ^]A,Q%1q^
Super depty measurement 'K:zW>l
A Ryoka Linnik interference objective lens equipped with an optical path compensation plate insertion mechanism allows measurement of the layer section under a transparent layer to a maximum depth 3 mm. This system is very useful for defect analysis after manufacturing of flat display panels such as plasma displays. /GQN34RD
Vevy weak interference fringe patterns can be capured xD|CQo}:
Since our original VSI interference image creation software enables image creation from very weak interference fringe patterns that cannot be visually recognizied, foreign particle locations in multilayer film can be identified. I_\#(
100 magnification interference is achieved #;WKuRv
A Ryoka Linnik interference objective lens allows easy adjustment and observation for 100 magnification interference figures for which alignment and adjustment have been difficult. =SEgv;#KZ~
NSIMAGIK compatible system t X Wh q
NSIMAGIK specifications common to various image creation systems and image processing system are fully supported. The required NSIMAGIK software can be freely selected, and future expansion of functions is possible. f(r=S Xa*
Specifications of stage .dvO Ut I[
Item RSY-150 RSY-300 +l8 `o QuG
Compressed Air ≧0.5Mpa ha -KfkPFE
Tube: Internal diameter 4mm, External diameter 6mm zQNkjQ{mx
Power Saurce Single-phase 100V 4KVA / ~\ I
Clean Room Response Response to Class 1000 ),u)#`.l
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Stage Unit Size 600(W)×500(D)×1400(H) 1200(W)×800(D)×1500(H) +YA,HhX9
Stage Unit Weight About 200kg About 300kg i; GF/pi
Control Rack Unit Size 570(W)×750(D)×1850(H) 5700(W)×750(D)×1850(H) SJXA
Control Rack Unit Weight About 180kg j$u=7Z&E
X-Y Stage m+ww
X Valid Stroke ±75mm ±150mm "dN4EA&QJ
Y Valid Stroke ±75mm ±150mm wP: w8O
Maximum Speed 10mm/sec {"x>ewAf
Actuator Ball screw, Open-loop control >Y\$9W=t
Stage Resolution 1μm/step K~I%"r|l
Repeatability ±1μm 2[; 4D/`*
Z axis MMYV8;c
Valid Stroke ±50mm 9jC> OZ0s
Actuator Grand screw, Open-loop control z|5Sy.H>
Z Axis Resolution ±1μm/step (Half-step) A/%+AH(
Jog-Dial 100μm/Revolution >2%*(nL
Joy-Stick Hi-speed setting: 80000pps, Low-speed setting: 200pps 6L)]nE0^
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日本神津精机中国总代理： F ^mMy K
广州市嘉铭工业器材有限公司 "yo~;[
地 址：广州市广州大道中明月一路20号明月阁2403室 6S 2u% -]
联系人：MR.Huang MSN:htj@kmischina.com 4-wCk=I
电 话：+86 020-87392866-211 传真：87361189 42Vz6 k:
E-mail:htj@kmischina.com CI~P3"`]
http:www.kmischina.com
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