| kmischina |
2010-03-05 16:38 |
断层面计测系统
Layer Profiling System _t>"5s&i
The layer profiling system performs layer structural by generating tomographic images of specified cutting location from potical microscope images that are obtained by moving sequentially in the vertical direction. %&blJ6b
Features
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Super depty measurement dJuD|9R
A Ryoka Linnik interference objective lens equipped with an optical path compensation plate insertion mechanism allows measurement of the layer section under a transparent layer to a maximum depth 3 mm. This system is very useful for defect analysis after manufacturing of flat display panels such as plasma displays. l|`^*%W@u6
Vevy weak interference fringe patterns can be capured 9";sMB} W*
Since our original VSI interference image creation software enables image creation from very weak interference fringe patterns that cannot be visually recognizied, foreign particle locations in multilayer film can be identified. qYB~VE03
100 magnification interference is achieved PS>x,T
A Ryoka Linnik interference objective lens allows easy adjustment and observation for 100 magnification interference figures for which alignment and adjustment have been difficult. :7.Me ;RA
NSIMAGIK compatible system V2 d,ksKwn
NSIMAGIK specifications common to various image creation systems and image processing system are fully supported. The required NSIMAGIK software can be freely selected, and future expansion of functions is possible. ]ya; v '
Specifications of stage Djt%r<
Item RSY-150 RSY-300 Qst$S} n
Compressed Air ≧0.5Mpa }d
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Tube: Internal diameter 4mm, External diameter 6mm WC q
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Power Saurce Single-phase 100V 4KVA U b$n |xn
Clean Room Response Response to Class 1000 h1 D?=M\9
Stage Unit Size 600(W)×500(D)×1400(H) 1200(W)×800(D)×1500(H) z%d#@w0X1
Stage Unit Weight About 200kg About 300kg p3951-D
Control Rack Unit Size 570(W)×750(D)×1850(H) 5700(W)×750(D)×1850(H) eny/
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Control Rack Unit Weight About 180kg @_ygn Nn4R
X-Y Stage nhT(P`6
X Valid Stroke ±75mm ±150mm ~Qj}ijWD
Y Valid Stroke ±75mm ±150mm G-um`/ <%
Maximum Speed 10mm/sec ;/O#4]2*
Actuator Ball screw, Open-loop control ':h
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Stage Resolution 1μm/step Gpj* V|J
Repeatability ±1μm S]/b\ B.h+
Z axis E9 fxjI%1
Valid Stroke ±50mm t;qP ']2
Actuator Grand screw, Open-loop control h) (* q+a
Z Axis Resolution ±1μm/step (Half-step) *A}WP_ZQ
Jog-Dial 100μm/Revolution A$/\1282
Joy-Stick Hi-speed setting: 80000pps, Low-speed setting: 200pps eCbf 9B
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日本神津精机中国总代理： S7iDTG_@t
广州市嘉铭工业器材有限公司 ~eh0[mF^]
地 址：广州市广州大道中明月一路20号明月阁2403室 VDF)zA1 V
联系人：MR.Huang MSN:htj@kmischina.com ,I.WX,OR
电 话：+86 020-87392866-211 传真：87361189 X$?3U!
E-mail:htj@kmischina.com Zl/< w(f_
http:www.kmischina.com
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