银内反反射率上不去
请教各位大佬,银内反,要求420-680nm平均反射大于95,绝对反射大于91,实际只能达到平均94,420最低只有88%,新科隆机台,射频离子源,加工温度90度,请问是工艺问题,还是膜厚问题,该怎么调整? 9/M!S[N9 %MJ7u}
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