| 电子厂女工xp |
2024-05-14 08:52 |
Measuring the angles and pyramidal error of high-precision prisms
Measuring the angles and pyramidal error of high-precision prisms -@"3`uv"
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High-precision prisms, having maximum angle tolerances |7c],SHm
of 1 to 3 arcsec, find increasing application in optical metrology. S u6kpC!EW
Reported interferometric techniques for measuring GEc-< `-
the wedge angles of such prisms achieve a precision of up <1*.:CL"s
to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques V=8db% ^
have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric 7CH&n4v
methods have made use of goniometers,2 Cy$~H
spectrometers,3 master prisms,4,5 and collimators.6 However, #C&';HB;y
in the literature there are few reported methods for ,5;M(f t#
measuring the pyramidal error, and the majority rely on h@$SJe(hl
visual observation,2,7,8 by which it is only possible to measure @u9L+*F
pyramidal errors to the order of 1 arcmin ~Ref. 8!. -J+1V{
In the new arrangement presented here, one can measure 6)uBUM;i
the prism angle and the pyramidal error separately or in pS+w4gW
combination. This is possible because the measurements O~V^]
are made simultaneously but with different techniques.
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