| 电子厂女工xp |
2024-05-14 08:52 |
Measuring the angles and pyramidal error of high-precision prisms
Measuring the angles and pyramidal error of high-precision prisms PitDk
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High-precision prisms, having maximum angle tolerances X,i^OM_
of 1 to 3 arcsec, find increasing application in optical metrology. QAKA3{-(
Reported interferometric techniques for measuring szU_,.\
the wedge angles of such prisms achieve a precision of up "gGv>]3
to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques X1~ WQ?ww
have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric 137:T:
methods have made use of goniometers,2 m< | *
spectrometers,3 master prisms,4,5 and collimators.6 However, g0-J8&?X
in the literature there are few reported methods for qr_:zXsob_
measuring the pyramidal error, and the majority rely on Y SD|#0
visual observation,2,7,8 by which it is only possible to measure !O*uQB
pyramidal errors to the order of 1 arcmin ~Ref. 8!. @6:J$B~)u
In the new arrangement presented here, one can measure $WHm G!)*
the prism angle and the pyramidal error separately or in P`!31P#]L
combination. This is possible because the measurements yOXL19d@p_
are made simultaneously but with different techniques.
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