| 电子厂女工xp |
2024-05-14 08:52 |
Measuring the angles and pyramidal error of high-precision prisms
Measuring the angles and pyramidal error of high-precision prisms f<<1.4)oSV
`f S$@{YI_
High-precision prisms, having maximum angle tolerances Ko: <@h
of 1 to 3 arcsec, find increasing application in optical metrology. y2KR^/LN|Y
Reported interferometric techniques for measuring 0l;TZf=H
the wedge angles of such prisms achieve a precision of up ^? }-x
to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques G
.NGS%v
have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric Cs))9'cD]
methods have made use of goniometers,2 Z ):q 1:y
spectrometers,3 master prisms,4,5 and collimators.6 However, 1aDx 6Mq
in the literature there are few reported methods for s+DOr$\
measuring the pyramidal error, and the majority rely on e w?4;
visual observation,2,7,8 by which it is only possible to measure yvv]iRk<
pyramidal errors to the order of 1 arcmin ~Ref. 8!. shKTj5 s?
In the new arrangement presented here, one can measure \ ,D>zF
the prism angle and the pyramidal error separately or in uVN2}3!)Y
combination. This is possible because the measurements T\q:
are made simultaneously but with different techniques.
|
|