| 电子厂女工xp |
2024-05-14 08:52 |
Measuring the angles and pyramidal error of high-precision prisms
Measuring the angles and pyramidal error of high-precision prisms |xcC'1WU
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High-precision prisms, having maximum angle tolerances 05T?c{ ;
of 1 to 3 arcsec, find increasing application in optical metrology. 2m:K
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Reported interferometric techniques for measuring W/xPVmnV
the wedge angles of such prisms achieve a precision of up 1h?ve,$
to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques U364'O8_
have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric &Wcz~Gx3Q
methods have made use of goniometers,2 @4T
spectrometers,3 master prisms,4,5 and collimators.6 However, 1:](=%oM&k
in the literature there are few reported methods for b7dsi|Yo
measuring the pyramidal error, and the majority rely on 0VtjVz*C7&
visual observation,2,7,8 by which it is only possible to measure <_< zrXc]
pyramidal errors to the order of 1 arcmin ~Ref. 8!. jaodcT0
In the new arrangement presented here, one can measure |<h}'
the prism angle and the pyramidal error separately or in [B; okW
combination. This is possible because the measurements )MF@'zRK
are made simultaneously but with different techniques.
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