| 电子厂女工xp |
2024-05-14 08:52 |
Measuring the angles and pyramidal error of high-precision prisms
Measuring the angles and pyramidal error of high-precision prisms
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High-precision prisms, having maximum angle tolerances d6i}xnmC
of 1 to 3 arcsec, find increasing application in optical metrology. ][
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Reported interferometric techniques for measuring *l7 `C )
the wedge angles of such prisms achieve a precision of up Xu{y5 N
to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques 6#=Iv X4
have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric htB2?%S=T
methods have made use of goniometers,2 4M C]s~n
spectrometers,3 master prisms,4,5 and collimators.6 However,
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in the literature there are few reported methods for xU;SRB
measuring the pyramidal error, and the majority rely on \`k=9{R.
visual observation,2,7,8 by which it is only possible to measure IADSWzQ@
pyramidal errors to the order of 1 arcmin ~Ref. 8!. 5<Kt"5Z%7
In the new arrangement presented here, one can measure ^#5'` #t
the prism angle and the pyramidal error separately or in <$A,|m
combination. This is possible because the measurements < F5 VJ
are made simultaneously but with different techniques.
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