| 电子厂女工xp |
2024-05-14 08:52 |
Measuring the angles and pyramidal error of high-precision prisms
Measuring the angles and pyramidal error of high-precision prisms G+^$JN=
m- FDCiN>
High-precision prisms, having maximum angle tolerances Q>c6ouuJ
of 1 to 3 arcsec, find increasing application in optical metrology. T[=cKYp8\
Reported interferometric techniques for measuring w=>m G-
the wedge angles of such prisms achieve a precision of up A|OC?NZY
to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques g-gBg\y{v
have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric ,ST.pu8N.
methods have made use of goniometers,2 Ca"+t
lO
spectrometers,3 master prisms,4,5 and collimators.6 However, 2/q=l?
in the literature there are few reported methods for 'm? x2$u8
measuring the pyramidal error, and the majority rely on & _hCs![
visual observation,2,7,8 by which it is only possible to measure 0BD((oNg
pyramidal errors to the order of 1 arcmin ~Ref. 8!. __%E!*m"<_
In the new arrangement presented here, one can measure 3s$.l }
the prism angle and the pyramidal error separately or in myX0<j3G5
combination. This is possible because the measurements wz)9/bL
are made simultaneously but with different techniques.
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