cswmsc |
2007-02-28 23:18 |
真空术语全集
“真空术语”好像论坛中没有,发一个希望有朋友喜欢。 m/cx|b3hqv --------------------------------------------------- J511AoQ{R 真空术语 x9TuweG aTi0bQW{ 1.标准环境条件 standard ambient condition: QK,=5~I J 2.气体的标准状态 standard reference conditions forgases: 8 `yB 3.压力(压强)p pressure: 0VG^GKmx 4.帕斯卡Pa pascal: n2H&t>N 5.托Torr torr: \gjl^#; 6.标准大气压atm standard atmosphere: L/c4"f|.*v 7.毫巴mbar millibar: }`?7\\6 8.分压力 partial pressure: 7Z9.z4\ 9.全压力 total pressure: O#A8t<f|M 10.真空 vacuum: E`U&Z 11.真空度 degree of vacuum: 8U8P
g2 12.真空区域 ranges of vacuum: T %$2k> 13.气体 gas: F%9e@{ 14.非可凝气体 non-condensable gas: T,A!5V>cX 15.蒸汽vapor: 3KB|NS 16.饱和蒸汽压saturation vapor pressure: {-~05,zE 17.饱和度degree of saturation: [9'|7fdU 18.饱和蒸汽saturated vapor: wA{*W>i 19.未饱和蒸汽unsaturated vapor: lK_
~d_f 20.分子数密度n,m-3 number density of molecules: "K/[[wX\b 21.平均自由程ι、λ,m mean free path: "tEj`eR 22.碰撞率ψ collision rate: z&\Il#'\m+ 23.体积碰撞率χ volume collision rate: nYo&x' 24.气体量G quantity of gas: hqdC9?\ 25.气体的扩散 diffusion of gas: 721{Ga4~S 26.扩散系数D diffusion coefficient; diffusivity: ))8Emk^Q{ 27.粘滞流 viscous flow: HCI'q\\ 28.粘滞系数η viscous factor: 9(i0"hS^ 29.泊肖叶流 poiseuille flow: mYzsTUq 30.中间流 intermediate flow: eV@4VxaZ 31.分子流 molecular flow: W*1d
X"S 32克努曾数 number of knudsen: uZo]8mV 33.分子泻流 molecular effusion; effusive flow: #p']-No 34.流逸 transpiration: #JHy[!4 35.热流逸 thermal transpiration: f>.`xC{ 36.分子流率qN molecular flow rate; molecular flux: \HBVNBY 37.分子流率密度 molecular flow rate density; density of molecular flux: UUt~W 38.质量流率qm mass flow rare: z_5rAlnwT. 39.流量qG throughput of gas: *C[4 (DmB 40.体积流率qV volume flow rate: S.zg& 41.摩尔流率qυ molar flow rate: -6.i\
B 42.麦克斯韦速度分布 maxwellian velocity distribution: U^vUdM" 43.传输几率Pc transmission probability: Uqb]e?@ 44.分子流导CN,UN molecular conductance: P]~N-xdV 45.流导C,U conductance: B<vvsp\X 46.固有流导Ci,Ui intrinsic conductance: ?GaI6?lbn 47.流阻W resistance: ^TuP=q5? 48.吸附 sorption: v9X7-GJ~ 49.表面吸附 adsorption: (**-"o]HH 50.物理吸附physisorption: N>W;0u! 51.化学吸附 chemisorption: G_4K+
-K 52.吸收absorption: [u!p- 53.适应系数α accommodation factor: uD0(aqAZ 54.入射率υ impingement rate: Y^*Lh/:h 55.凝结率condensation rate: }.fZy&_
56.粘着率 sticking rate: FF~on06! 57.粘着几率Ps sticking probability: wR5\^[GN 58.滞留时间τ residence time: yoq\9* ?u^ 59.迁移 migration: Cy`<^_i 60.解吸 desorption: WcV\kemf 61.去气 degassing: (6b?ir ~ 62.放气 outgassing: e>ZbZy? 63.解吸或放气或去气速率qGU desorption or outgassing or degassing rate: *o:BoP=S 64.蒸发率 evaporation rate: @'k,\$ / 65.渗透 permeation: ;W$w=j:
O{ 66.渗透率φ permeability: 6Y92& 67.渗透系数P permeability coefficient bn<I#ZH2 2. 1.真空泵 vacuum pumps )D6'k{6 M 1-1.容积真空泵 positive displacement pump: S20 nk.x ⑴.气镇真空泵 gas ballast vacuum pump: 42b=z//; ⑵.油封(液封)真空泵oil sealed (liquid-sealed) vacuum pump: !.tL"U~4 ⑶.干封真空泵 dry-sealed vacuum pump: B J:E,P`_ ⑷.往复真空泵 piston vacuum pump: pUCEYR ⑸.液环真空泵 liquid ring vacuum pump: Q+y-*1
⑹.旋片真空泵 sliding vane rotary vacuum pump: ~x+:44* ⑺.定片真空泵 rotary piston vacuum pump: eY6gb!5u ⑻.滑阀真空泵 rotary plunger vacuum pump: $w";*">:0 ⑼.余摆线真空泵 trochoidal vacuum pump: &kr_CP:; ⑽.多室旋片真空泵 multi-chamber sliding vane rotary vacuum pump: W_e-7=6 ⑾.罗茨真空泵 roots vacuum pump: +Zty}fe 1-2.动量传输泵 kinetic vacuum pump: <.?^LT ⑴.牵引分子泵molecular drag pump: }R(0[0NQe- ⑵.涡轮分子泵turbo molecular pump: sTYuwna~
⑶.喷射真空泵ejector vacuum pump: >ji}j~cH ⑷.液体喷射真空泵liquid jet vacuum pump: Q9 x` Uy ⑸.气体喷射真空泵gas jet vacuum pump: dH2j*G Ij ⑹.蒸汽喷射真空泵vapor jet vacuum pump : `0n 7Cyed ⑺.扩散泵diffusion pump : ~,`\D7Z3 ⑻.自净化扩散泵self purifying diffusion pump: fxtYo,;$ ⑼.分馏扩散泵 fractionating diffusion pump : #Kb)>gzT ⑽.扩散喷射泵diffusion ejector pump : W~+!"^<n ⑾.离子传输泵ion transfer pump: )P(d66yq'u 1-3.捕集真空泵 entrapment vacuum pump: }{w_>!ee ⑴吸附泵adsorption pump: pO 7{3% ⑵.吸气剂泵 getter pump: bCY^.S- ⑶.升华(蒸发)泵 sublimation (evaporation)pump : 2\iD;Z#gM ⑷.吸气剂离子泵getter ion pump: Xx9~ ⑸.蒸发离子泵 evaporation ion pump: Ekg N6S`} ⑹.溅射离子泵sputter ion pump: Rm[rQ}: ⑺.低温泵cryopump: n_!]B_Vd$ s6eq?1l3 2.真空泵零部件 2!~>)N 2-1.泵壳 pump case: (-G(^Tn 2-2.入口 inlet: Vqv2F @. 2-3.出口outlet: [<3Q$*Ew 2-4.旋片(滑片、滑阀)vane; blade : 6wvhvMkS 2-5.排气阀discharge valve: WkU)I2oH 2-6.气镇阀gas ballast valve: ?XTg%U
2-7.膨胀室expansion chamber: ^JF_;~C 2-8.压缩室compression chamber: Um0<I) 2-9.真空泵油 vacuum pump oil: vI:bl~ 2-10.泵液 pump fluid: f'zFg["aZS 2-11.喷嘴 nozzle: E#HU?<q8 2-13.喷嘴扩张率nozzle expansion rate: 'mY,>#sT 2-14.喷嘴间隙面积 nozzle clearance area : @u'27c_<d3 2-15.喷嘴间隙nozzle clearance: >FMT#x t 2-16.射流jet: 83 ^,'Z 2-17.扩散器diffuser: * v7& T 2-18.扩散器喉部diffuser thoat: :xUl+(+ 2-19.蒸汽导管vapor tube(pipe;chimney): ;6&=]I 2-20.喷嘴组件nozzle assembly: OD@@O9 2-21.下裙skirt: 5+Zx-oWq_ PB3!; 3.附件 *IO;`k q,; 3-1阱trap: %N_S/V0` ⑴.冷阱 cold trap: }RP 9%n^ ⑵.吸附阱sorption trap: ?\p%Mx? ⑶.离子阱ion trap: da86Jj=k ⑷.冷冻升华阱 cryosublimation trap: wGQ hr=" 3-2.挡板baffle: Uub%s`O 3-3.油分离器oil separator: %[bO\, 3-4.油净化器oil purifier: bEXHB 3-5.冷凝器condenser: kk\zZC
< E,yzy[gl 4.泵按工作分类 @v-)|8GdY 4-1.主泵main pump: Z_4H2HseL 4-2.粗抽泵roughing vacuum pump: Go+,jT- 4-3.前级真空泵backing vacuum pump: u{lDof> 4-4.粗(低)真空泵 roughing(low)vacuum pump: O
|I:[S}, 4-5.维持真空泵holding vacuum pump: kKk |@ 4-6.高真空泵high vacuum pump: 8!fAv$g0 4-7.超高真空泵ultra-high vacuum pump: *p5T 4-8.增压真空泵booster vacuum pump: 2Q_{2(nQb )1yUV*6 5.真空泵特性 RO3e 5-1.真空泵的抽气速率(体积流率)s volume flow rate of a vacuum pump: `::(jW.KO 5-2.真空泵的抽气量Q throughput of vacuum pump:。 KL\=:iWA 5-3.起动压力starting pressure: t:j07 ,1~ 5-4.前级压力 backing pressure : &T/9yW[L 5-5.临界前级压力 critical backing pressure: 9qO:K79| 5-6.最大前级压力maximum backing pressure: .$s|T 5-7.最大工作压力maximum working pressure: ;NVTn<Uj 5-8.真空泵的极限压力ultimate pressure of a pump: 9C'+~<l 5-9.压缩比compression ratio: A5H8+gATK 5-10.何氏系数Ho coefficient: .1q~,}toX 5-11.抽速系数speed factor: bFdg'_ 5-12.气体的反扩散back-diffusion of gas: Gqz)=' 5-13.泵液返流back-streaming of pump fluid: T7Qd
I[K%b 5-14.返流率back-streaming rate 8_,wOkk_B 5-15.返迁移back-migration: 7z0uj 5-16.爆腾bumping: i$<v*$.o 5-17.水蒸气允许量qm water vapor tolerable load: O09g b[ 5-18.最大允许水蒸气入口压力maximum tolerable water vapor inlet pressure: *z:lq2"G 5-19.蒸汽喷射泵、扩散泵或扩散喷射泵的加热时间warm-up time for a vapor jet pump or a diffusion pump or a diffusion ejector pump: UU~;B 5-20.蒸汽喷射泵、扩散泵或扩散喷射泵的冷却时间cool-down time for a vapor jet pump or a diffusion pump or a diffusion ejector pump n)7$xYuH 3. 1.一般术语 ~9jP++& 1-1.压力计pressure gauge: [&}<!:9' 1-2.真空计vacuum gauge: kk./-G ⑴.规头(规管)gauge head: 2o3k=hKS ⑵.裸规nude gauge : 2
]6u
Be ⑶.真空计控制单元gauge control unit : `,]PM)iC ⑷.真空计指示单元gauge indicating unit : 0J,d9a [1 zgOwSg8 2.真空计一般分类 r\- k/ 0 2-1.压差式真空计differential vacuum gauge: f6A['<%o 2-2.绝对真空计 absolute vacuum gauge: -hV KPIb 2-3.全压真空计total pressure vacuum gauge: ^9~%=k= 2-4.分压真空计;分压分析器partial pressure vacuum gauge; partial pressure analyser: k#G7`dJl 2-5.相对真空计relative vacuum gauge : FNRE_83 6#63D>OWp 3.真空计特性 >bP7}T 3-1.真空计测量范围pressure range of vacuum gauge: e$|)wOwU 3-2.灵敏度系数sensitivity coefficient: !x /Z" 3-4. 电离规系数(压力单位倒数)ionization gauge coefficient (in inverse pressure units): p"
W0$t. 3-5.规管光电流photon current of vacuum gauge head: (j
Q6~1 3-6.等效氮压力equivalent nitrogen pressure : '"p*FN 3-7.X射线极限值 X-ray limit: <g1hdF0 3-8.逆X射线效应anti X-ray effect: on&=%tCAL 3-9.布利尔斯效应blears effect: MM$"6Jor &=O1Qg=K 4.全压真空计 Fd.d( 4-1.液位压力计liquid level manometer: T}x%=4<E 4-2.弹性元件真空计elastic element vacuum gauge: zC;lfy{f= 4-3.压缩式真空计compression gauge: i_^NbC 4-4.压力天平pressure balance: F09AX'nj 4-5.粘滞性真空计viscosity gauge : 5!fW&OiY 4-6.热传导真空计thermal conductivity vacuum gauge : eTHh 4-7.热分子真空计thermo-molecular gauge: ]KT,s]. 4-8.电离真空计ionization vacuum gauge: w:(7fu= 4-9.放射性电离真空计radioactive ionization gauge: ai9,4 4-10.冷阴极电离真空计cold cathode ionization gauge: euC,]n. 4-11.潘宁真空计penning gauge: L uKm 4-12.冷阴极磁控管真空计cold cathode magnetron gauge: t O;W?g 4-13.放电管指示器discharge tube indicator: !9OgA 4-14.热阴极电离真空计hot cathode ionization gauge: )f&]H} 4-15.三极管式真空计triode gauge: .Sw'Bo!Ee 4-16.高压力电离(中真空)真空计high pressure (medium vacuum) ionization gauge: CUcjJ|MZ 4-17.B-A型电离真空计Bayard-Alpert gauge: Qj[O$L0 $ 4-18.调制型电离真空计modulator gauge: [)c|oh% 4-19.抑制型电离真空计suppressor gauge: C^O^Jj5X% 4-20.分离型电离真空计extractor gauge: XmR5dLc8 4-21.弯注型电离真空计bent beam gauge: m(]IxI 4-22.弹道型电离真空计 orbitron gauge : > PA,72e 4-23.热阴极磁控管真空计hot cathode magnetron gauge: kfECC&" /a)=B)NH 5.分压真空计(分压分析器) 8 z7,W3b 5-1.射频质谱仪radio frequency mass spectrometer: Lwk- 5-2.四极质谱仪(四级滤质器)quadrupole mass spectrometer;quadrupole mass filer: 1"PE@!] 5-3.单极质谱仪momopole mass spectrometer: Q(7l<z 5-4.双聚焦质谱仪double focusing mass spectrometer: 3o^M% 5-5.磁偏转质谱仪magnetic deflection mass spectrometer: !qv;F?2
<g 5-6.余摆线聚焦质谱仪trochoidal focusing mass spectrometer: nmrk-#._@9 5-7.回旋质谱仪omegatron mass spectrometer: j)*nE./3 5-8.飞行时间质谱仪time of flight mass spectrometer: *&MkkI# RjHpC7b*% 6.真空计校准 F'*4:WD7 6-1.标准真空计reference gauges: ^2@~AD`&h 6-2.校准系统system of calibration: 54%}JA][ 6-3.校准系数K calibration coefficient: 4tTJE<y 6-4.压缩计法meleod gauge method: essW,2,rjC 6-5.膨胀法expansion method: NWj@iyi< 6-6.流导法flow method: )Cfrqe1^ 4. 1.真空系统vacuum system 3Re\ T 1-1.真空机组pump system: P://Zi6> 1-2.有油真空机组pump system used oil : MqH~L?~}| 1-3.无油真空机组oil free pump system PCjY,O 1-4.连续处理真空设备continuous treatment vacuum plant: @kymL8"2w 1-5.闸门式真空系统vacuum system with an air-lock: P^-9?uBno 1-6.压差真空系统differentially pumped vacuum system: ^123.Ru|t 1-7.进气系统gas admittance system: *h6i9V%' uD3_'a 2.真空系统特性参量 ![%,pip2/& 2-1.抽气装置的抽速volume flow rate of a pumping unit : ?>&Zm$5V 2-2.抽气装置的抽气量throughput of a pumping unit : W -&5
v 2-3.真空系统的放气速率degassing(outgassing) throughput of a vacuum system: 4pv:u:Z 2-4.真空系统的漏气速率leak throughput of a vacuum system: H)tDfk sq\ 2-5.真空容器的升压速率rate of pressure rise of a vacuum chamber: ?Pc3*. 2-6.极限压力ultimate pressure: X.<R['U&\ 2-7.残余压力residual pressure: pT tX[CE 2-8.残余气体谱residual gas spectrum: ~yN,F pD 2-9.基础压力base pressure: CXZeL 1+ 2-10.工作压力working pressure: Jmx}r,j 2-11.粗抽时间roughing time: 3s2M$3r)6 2-12.抽气时间pump-down time: v(~m!8!TI 2-13.真空系统时间常数time constant of a vacuum system: |&7,g 2-14.真空系统进气时间venting time: [DwB7l)O( sd%~pY} 3.真空容器 RkzBn 3-1.真空容器;真空室vacuum chamber: ibyA~YUN/ 3-2.封离真空装置sealed vacuum device: `m^OnH 3-3.真空钟罩vacuum bell jar: ;\N*iN#K 3-4.真空容器底板vacuum base plate: RSC-+c6 1 3-5.真空岐管vacuum manifold: =d}3>YHS 3-6.前级真空容器(贮气罐)backing reservoir: ~JpUO~i/ 3-7.真空保护层outer chamber: KG$2u:n 3-8.真空闸室vacuum air lock: ZD(gYNi 3-9.真空冷凝器;蒸汽冷凝器device for condensing vapor: %3j5Q 9K!='u` 4.真空封接和真空引入线 KJ_R@,v\ 4-1.永久性真空封接permanent seal : D2bUSRrb 4.2.玻璃分级过渡封接graded seal : )RFeF!(" 4-3.压缩玻璃金属封接compression glass-to-metal seal: m@YLZ 4-4.匹配式玻璃金属封接matched glass-to-metal seal: :F&WlU$L 4-5.陶瓷金属封接ceramic-to-metal seal: "f_Z.6WMY 4-6.半永久性真空封接semi-permanent seal : t=AR>M!w~ 4-7.可拆卸的真空封接demountable joint: tUQ)q 4-8.液体真空封接liquid seal ;H lv 4-9.熔融金属真空封接molten metal seal: `Z-`-IL 4-10.研磨面搭接封接ground and lapped seal: @#apOoVW> 4-11.真空法兰连接vacuum flange connection: V_!i KEU 4-12.真空密封垫vacuum-tight gasket: nP^$p C 4-13.真空密封圈ring gasket: e=2D^G#qE 4-14.真空平密封垫flat gasket: bd4q/w4q 4-15.真空引入线feedthrough leadthrough: eORt
qX8* 4-16.真空轴密封shaft seal: YVT^}7# 4-17.真空窗vacuum window: *C \O]r:' 4-18.观察窗viewing window: OjZ@_V: N2>JG]G 5.真空阀门 i weP3u## 5-1.真空阀门的特性characteristic of vacuum valves: 0*)79Sz ⑴.真空阀门的流导conductance of vacuum valves: fvDwg ⑵.真空阀门的阀座漏气率leak rate of the vacuum seat: rzu^br9X 5-2.真空调节阀regulating valve: ;Peyo1 5-3.微调阀 micro-adjustable valve: KVuv%? 5-4.充气阀charge valve: Z>l>@wN m 5-5.进气阀gas admittance valve: #^Y,,GA 5-6.真空截止阀break valve: :Lx]`dSk 5-7.前级真空阀backing valve: m|
Z)h{& 5-8.旁通阀 by-pass valve: iX=*qiVX 5-9.主真空阀main vacuum valve: .
fIodk 5-10.低真空阀low vacuum valve: |($pXVLH` 5-11.高真空阀high vacuum valve: x+pFu5, 5-12.超高真空阀;UHV阀 ultra-high vacuum valve: o0 Ae*Y0 5-13.手动阀manually operated valve: x>^S..K}L% 5-14.气动阀pneumatically operated valve: yFSL7`p+ 5-15.电磁阀electromagnetically operated valve: fOVRtSls 5-16.电动阀valve with electrically motorized operation: utr_fFu 5-17.挡板阀baffle valve: GOt@x9% 5-18.翻板阀flap valve: nV,a|V5Xm 5-19.插板阀gate valve: (I$hw"%& 5-20.蝶阀butterfly valve: < | |