| mang2004 |
2019-10-12 01:13 |
High-Q microresonators integrated with microheaters on a 3C-SiC-on-insulator platform 21NGsG
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Xi Wu, Tianren Fan, Ali A. Eftekhar, and Ali Adibi ` 9;0Y
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We demonstrate, to the best of our knowledge, the first thermally reconfigurable high-𝑄 silicon carbide (SiC) microring resonators with integrated microheaters on a 3C-SiC-on-insulator platform. We extract a thermo-optic coefficient of around 2.67×10 −5 /K ~2.67×10−5/K for 3C-SiC from wavelength shift of a resonator heated by a hot plate. Finally, we fabricate a 40-μm-radius microring resonator with intrinsic 𝑄 of 139,000 at infrared wavelengths (∼1550 nm ) after integration with a NiCr microheater. By applying current through the microheater, a resonance shift of 30 pm/mW is achieved in the microring, corresponding to ∼50 mW per 𝜋 phase shift. This platform offers an easy and reliable way for integration with electronic devices as well as great potential for diverse integrated optics applications. 5OEo(&
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