SYNOPSYS 光学设计软件课程四十二：复杂的干涉仪

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本课程介绍了设计干涉仪的步骤。 Pc7:hu  
干涉仪有两个通道，光束在分束器处叠加。 人们经常希望看到两个波前形状的差异，就像测试非球面镜时一样。 U %ESuq#  
在该示例中，两个通道之间的条纹在其中一个反射镜的位置来回移动时给出光谱信息。 这种配置的仪器称为傅里叶变换干涉仪。 这里不关心波前的形状，而是关注其绝对相位。 zoJ;5a.3B  
我们将首先设置一个通道， 以下是第一步的输入：

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    RLE 8Vn6* Xn  
    ID INTERFEROMETER EXAMPLE (*RybKoaA  
    WAVL 4.6 4.25 3.9 -!0LIr:"  
    OBB 0 1 30 0 0 0 30 z~H Gc"~  
    1 TH 100             ! DUMMY SURFACE FOR REFERENCE N>R%0m<e  
    2 AT -45 0 100       ! SCAN MIRROR )^\='(s  
    2 REFL x/7G0K2\}  
    2    TH 0 3+-(;>>\  
    3    AT -45 0 100       ! FOLD AXIS _}&]`,s>  
    3    TH -200            ! TO BEAMSPLITTER 8UIL_nPO  
    4    TH -3 GTB U        ! THROUGH 3 MM THICK GERMANIUM RFJ;hh  
    GE Tv$7aVi!  
    5 REFL               ! REFLECT AT BEAMSPLITTER 5u46Vl{  
    5 PTH -4 PIN 4       ! COMING BACK AGAIN j
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    4 AT 30 0 100        ! TILT OF BEAMSPLITTER cDiz!n*.q  
    7 AT 30 0 100        ! TILT AXIS NXBOo  
    7    TH 70              ! TO REFERENCE MIRROR 32iI :u  
    8    REFL               ! HERE Nd_@J&  
    8    PTH -7             ! BACK TO BEAMSPLITTER BFOFes`>~  
    9    AT -30 0 100       ! ENTER IT AGAIN 6p"c^  
    9    PTH 4 PIN 4        ! SAME SIZE AS BEFORE tTGK25&  
    10    TH -.1            ! SMALL AIRSPACE #Qr4Ke$g[l  
    11 PTH 4 PIN 4       ! COMPENSATOR DUPLICATES GEOMETRY [kOA+\v  
    12 DANSexW  
    13 AT 30 0 100       ! DUMMY TO FOLLOW BEAM U!/nD~A  
    13 TH -200           ! DISTANCE TO FOLD MIRROR 1 &HK
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    14 AT -30 0 100      ! RIGHT HERE ~TH5>``;gF  
    14 GID Qs9U&*L  
    FOLD 1               ! IDENTIFY IT @MB _gt)7?  
    14    REFL              ! REFLECT THERE 4w( vR
e  
    15    AT -30 0 100      ! DUMMY TO FOLLOW BEAM xacLlX+  
    15 TH 250            ! DISTANCE TO PRIMARY MIRROR Qcy`O m^2  
    16 RD -180 CC -1 TH -90  ! PARABOLOID HERE ;a&:r7]=  
    16 REFL              ! REFLECT THERE "Y]ZPFh#.  
    16    GID #( sNk,^Ax  
    PRIMARY M            ! IDENTIFY IT 1N!g`=}  
    17    AT 45 0 100       ! SMALL FOLD MIRROR o0G`Xn  
    17 REFL              ! REFLECT HERE U"+ ry.3`  
    17    GID DBBBpb~~  
    SECONDARY M          ! IDENTIFY IT A{I a21T7  
    18    AT 45 0 100       ! DUMMY TO FOLLOW BEAM yim$y,=d  
    18 TH 90             ! DISTANCE TO TERTIARY ox_h9=$-  
    19 RD -180 TH -350   ! DISTANCE TO FINAL IMAGE em[F|  
    19 REFL              ! REFLECT AT TERTIARY ph?
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    APS 19               ! THE STOP IS HERE y,?G75wij  
    19 GID .crM!{<Y  
    TERTIARY M 
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    20 =>0M3 Qh{  
    END

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    PANT =)- Q?1q  
    VY 19 ASPH |3:=qpT-  
    END $xtE+EV.p  
    AANT g#bu_E61B  
    GSR 0 1 4 P cNo4UZvr  
    END sV^h#g~Zb
 
    SYNO 10

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    SYNOPSYS AI>ASY 
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pR6A#DgB  
     SPECIAL SURFACE DATA ,(0XsBL  
     ______________________________________________________________________________ y8hg8J|  
      SURFACE NO.  16 -- CONIC SURFACE ?>.g;3E$  
      CONIC CONSTANT (CC)     -1.000000 '<D`:srV  
      SEMI-MAJOR AXIS (b) INFINITE       SEMI-MINOR AXIS (a) INFINITE nqxq@.L2  
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     _______________   SURFACE NO.  19 -- CONIC SURFACE   CONIC CONSTANT (CC)     -0.349174 FPMSaN P  
     SEMI-MAJOR AXIS (b)   -219.999999  SEMI-MINOR AXIS (a)    177.482393 vvsNWA
 
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     TILT AND DECENTER DATA +%#MrNM'  
     LEFT-HANDED COORDINATES 03QEXm~|Q  
     _______________________________________________________________________________ ^s@*ISY  
     SURF TYPE            X            Y            Z     ALPHA      BETA     GAMMA 9U<)_E<y  
     _______________________________________________________________________________ lDJd#U'V  
    2    REL         0.00000      0.00000      0.00000  -45.0000    0.0000    0.0000 22/?JWL>  
    3    REL         0.00000      0.00000      0.00000  -45.0000    0.0000    0.0000 }1]!#yMfq  
    4    REL         0.00000      0.00000      0.00000   30.0000    0.0000    0.0000 C*s0r;  
     7 REL         0.00000      0.00000      0.00000   30.0000    0.0000    0.0000 UiK+c30FU  
     9 REL         0.00000      0.00000      0.00000  -30.0000    0.0000    0.0000 -hVv  
    13    REL         0.00000      0.00000      0.00000   30.0000    0.0000    0.0000 JQ@`EV9,  
    14    REL         0.00000      0.00000      0.00000  -30.0000    0.0000    0.0000 P\X=*  
    15    REL         0.00000      0.00000      0.00000  -30.0000    0.0000    0.0000 L_~I
~  
    17 REL         0.00000      0.00000      0.00000   45.0000    0.0000    0.0000 pl#o!j(i  
    18 REL         0.00000      0.00000      0.00000   45.0000    0.0000    0.0000 6PJJ?}P^1  
     KEY TO SURFACE TYPES 3KG)6)1*  
     ____________________ QFNz9c  
     GLB  GLOBAL COORDINATES                 LOC  LOCAL COORDINATES moVa'1ul  
     REL  RELATIVE COORDINATES               REM  REMOTE TILTS IN RELATIVE COORD. }&(E#*>x  
     SYNOPSYS AI>

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    CHG GIC"-l1\  
    13 SIN            ! NEED TWO ADDITIONAL SURFACES ?BDlB0jxzi  
    13 SIN O&3r*vd  
    4 NAS             ! REMOVE TILTS THERE NOW y/@;c)1b9  
    7 NAS 6>=-/)p}  
    9 NAS Ql q#Zdru  
    13 NAS r%
TLv  
    4 TH -3 GTB U AY&9JSu6  
    GE n~,]KdU]  
    4    AT 30 0 100        ! TILT OF BEAMSPLITTER k,;lyE  
    5    TH -.1 TRANS 0r0\b*r  
    6    PTH 4 PIN 4 4aalhy<j  
    7    TH 0 Ho)t=qn  
    8    AT -30 0 100 [>$\s=` h  
    8 TRANS             ! NOT REFLECTIVE ANYMORE V`g\ja*Y  
    8    TH -70 bIb6yVnHi  
    9    REFL Iuu<2#gb8"  
    9    PTH -8 AIR uG=t?C6  
    10    AT 30 0 100 V4`:Vci Aw  
    10    PTH -4 PIN 4 ^I(oy.6?=p  
    11    PTH -5 ]^
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    12    REFL _'!N q  
    12    PTH 5 V6@*\+:3)  
    13    PTH 4 PIN 4 14 TH 0 J|gdO+  
    15 AT 30 0 100 yN9$gfJC^  
    15 TH -200 END

KFTf~!|  
    ACON 1 `7QvwXsH]  
    HPLOT 1 }[>RxHd  
    PER 0 0 0 1 123 $f<eq7rRe  
    PUP 2 1 11 ]5} -y3  
    PLOT _l24Ba$F6  
    RED P9 {}&z%:  
    TRA P 0 0 11 z'?7]C2b  
    END ig{A[7qN  
~rgf{oGz  
    ACON 2 hsTFAfa'  
    APLOT 1 ?(5o@Xq  
    PER 0 0 0 1 123 qZ8|B  
    PUP 2 1 11 D'7A2f  
    PLOT tJUVw=  
    BLUE =@
xN(](  
    TRA P 0 0 11 IvEMg2f}  
    END