SYNOPSYS 光学设计软件课程四十二：复杂的干涉仪

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本课程介绍了设计干涉仪的步骤。 E E|zY%  
干涉仪有两个通道，光束在分束器处叠加。 人们经常希望看到两个波前形状的差异，就像测试非球面镜时一样。 <u?hdwW\  
在该示例中，两个通道之间的条纹在其中一个反射镜的位置来回移动时给出光谱信息。 这种配置的仪器称为傅里叶变换干涉仪。 这里不关心波前的形状，而是关注其绝对相位。 I=%sDn  
我们将首先设置一个通道， 以下是第一步的输入：

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    RLE -b)zira  
    ID INTERFEROMETER EXAMPLE C55n  
    WAVL 4.6 4.25 3.9 N&ql(#r  
    OBB 0 1 30 0 0 0 30 b<(UmRxx3  
    1 TH 100             ! DUMMY SURFACE FOR REFERENCE G^ZkY  
    2 AT -45 0 100       ! SCAN MIRROR HCIF9{o1j>  
    2 REFL '<=MhNh\  
    2    TH 0 \ui^ d  
    3    AT -45 0 100       ! FOLD AXIS /eRtj:9M  
    3    TH -200            ! TO BEAMSPLITTER .XKvk(9  
    4    TH -3 GTB U        ! THROUGH 3 MM THICK GERMANIUM $ XsQ e  
    GE 7 3z Y^x  
    5 REFL               ! REFLECT AT BEAMSPLITTER 7oe@bS/Z  
    5 PTH -4 PIN 4       ! COMING BACK AGAIN x\hn;i<  
    4 AT 30 0 100        ! TILT OF BEAMSPLITTER iB3+KR  
    7 AT 30 0 100        ! TILT AXIS '}`hY1v  
    7    TH 70              ! TO REFERENCE MIRROR 0*;9CH=BE  
    8    REFL               ! HERE :/[YY?pg-  
    8    PTH -7             ! BACK TO BEAMSPLITTER m=iov2K>  
    9    AT -30 0 100       ! ENTER IT AGAIN kw^Dp[8X  
    9    PTH 4 PIN 4        ! SAME SIZE AS BEFORE DYKV54\ue  
    10    TH -.1            ! SMALL AIRSPACE wt.{Fqm  
    11 PTH 4 PIN 4       ! COMPENSATOR DUPLICATES GEOMETRY Df,VV+  
    12 `;qv}  
    13 AT 30 0 100       ! DUMMY TO FOLLOW BEAM &/hr-5k  
    13 TH -200           ! DISTANCE TO FOLD MIRROR 1 A Wh*<H  
    14 AT -30 0 100      ! RIGHT HERE p@
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    14 GID ,c7u  
    FOLD 1               ! IDENTIFY IT y]pN=<*h5  
    14    REFL              ! REFLECT THERE KaQq[a  
    15    AT -30 0 100      ! DUMMY TO FOLLOW BEAM yFU2'pB  
    15 TH 250            ! DISTANCE TO PRIMARY MIRROR l&sO?P[ /  
    16 RD -180 CC -1 TH -90  ! PARABOLOID HERE 0HJqsSZ$mW  
    16 REFL              ! REFLECT THERE 8cBW] \ v  
    16    GID Y5i`pY/}#?  
    PRIMARY M            ! IDENTIFY IT 9Oo*8wvGG  
    17    AT 45 0 100       ! SMALL FOLD MIRROR ?tC}M;~  
    17 REFL              ! REFLECT HERE d!QD vO  
    17    GID FSwgPIO>  
    SECONDARY M          ! IDENTIFY IT \eMYw7y5M  
    18    AT 45 0 100       ! DUMMY TO FOLLOW BEAM .xz,pn}  
    18 TH 90             ! DISTANCE TO TERTIARY (-'0g@0UA  
    19 RD -180 TH -350   ! DISTANCE TO FINAL IMAGE ^z%o];  
    19 REFL              ! REFLECT AT TERTIARY e7bT%h9i  
    APS 19               ! THE STOP IS HERE !Ir1qt8T  
    19 GID [m
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    TERTIARY M ptWG@"j/b  
    20 QVG0>,+}$  
    END

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    PANT yrE,,N%I  
    VY 19 ASPH W]!@Zlal  
    END zA'gb'MmW  
    AANT D#/%*|  
    GSR 0 1 4 P f.$aFOn  
    END _Xk03\n6  
    SYNO 10

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    SYNOPSYS AI>ASY LG Y!j_bD  
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     SPECIAL SURFACE DATA T[4[/n>i  
     ______________________________________________________________________________ 1O]5/Eu  
      SURFACE NO.  16 -- CONIC SURFACE ezg^5o;  
      CONIC CONSTANT (CC)     -1.000000 0?6If+AC  
      SEMI-MAJOR AXIS (b) INFINITE       SEMI-MINOR AXIS (a) INFINITE {7K'
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     _______________   SURFACE NO.  19 -- CONIC SURFACE   CONIC CONSTANT (CC)     -0.349174 %TW%|"v  
     SEMI-MAJOR AXIS (b)   -219.999999  SEMI-MINOR AXIS (a)    177.482393 [V2omSZo  
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     TILT AND DECENTER DATA
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     LEFT-HANDED COORDINATES `bZ2x
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     _______________________________________________________________________________ Msv*}^>  
     SURF TYPE            X            Y            Z     ALPHA      BETA     GAMMA 5D]30
  
     _______________________________________________________________________________  d-ag  
    2    REL         0.00000      0.00000      0.00000  -45.0000    0.0000    0.0000 }DDVGs[  
    3    REL         0.00000      0.00000      0.00000  -45.0000    0.0000    0.0000 z<yNG/M1>U  
    4    REL         0.00000      0.00000      0.00000   30.0000    0.0000    0.0000 [V> :`?  
     7 REL         0.00000      0.00000      0.00000   30.0000    0.0000    0.0000 daA47`+d  
     9 REL         0.00000      0.00000      0.00000  -30.0000    0.0000    0.0000 &O+sK4P  
    13    REL         0.00000      0.00000      0.00000   30.0000    0.0000    0.0000 55>" R{q  
    14    REL         0.00000      0.00000      0.00000  -30.0000    0.0000    0.0000 TbKP8zw{  
    15    REL         0.00000      0.00000      0.00000  -30.0000    0.0000    0.0000 vgh^fa!/  
    17 REL         0.00000      0.00000      0.00000   45.0000    0.0000    0.0000 >bX-!<S  
    18 REL         0.00000      0.00000      0.00000   45.0000    0.0000    0.0000 k9^+9P^L  
     KEY TO SURFACE TYPES -~vl+L  
     ____________________ IFd )OZ5  
     GLB  GLOBAL COORDINATES                 LOC  LOCAL COORDINATES K9e~Wl<3  
     REL  RELATIVE COORDINATES               REM  REMOTE TILTS IN RELATIVE COORD. o~OwE7H)A  
     SYNOPSYS AI>

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    CHG h*;g0QBkl  
    13 SIN            ! NEED TWO ADDITIONAL SURFACES )K>Eniou  
    13 SIN laUu"cS  
    4 NAS             ! REMOVE TILTS THERE NOW [K/O5_  
    7 NAS tr6jh=  
    9 NAS w+Z--@\  
    13 NAS 8 3z'#  
    4 TH -3 GTB U E^Q@9C<!d  
    GE ZNzR`6}  
    4    AT 30 0 100        ! TILT OF BEAMSPLITTER Veb+^&   
    5    TH -.1 TRANS ^%\)Xi  
    6    PTH 4 PIN 4 P &;y] ,)E  
    7    TH 0 $$haVY&  
    8    AT -30 0 100 u-AWJc+F.  
    8 TRANS             ! NOT REFLECTIVE ANYMORE `3f_d}b  
    8    TH -70 ,N;))3  
    9    REFL [D*J[?yt  
    9    PTH -8 AIR |A ;o0pL  
    10    AT 30 0 100 XIr{U5$<6  
    10    PTH -4 PIN 4 nc3sty1`  
    11    PTH -5 ]]el|  
    12    REFL 1a7!4)\  
    12    PTH 5 mgi,b2  
    13    PTH 4 PIN 4 14 TH 0 iBG`43;  
    15 AT 30 0 100 5h_<R!jA  
    15 TH -200 END

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    ACON 1 u9TzZ  
    HPLOT 1 lp
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    PER 0 0 0 1 123 ./5jx2V  
    PUP 2 1 11 o .l;: Un  
    PLOT q>^hoW2$C  
    RED ANckv|&'v  
    TRA P 0 0 11 . _1jk  
    END J&A;#<qY  
U{73Xax  
    ACON 2 "e~k
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    APLOT 1 \.c]kG>k-  
    PER 0 0 0 1 123 zL9VR;q  
    PUP 2 1 11 .4wTjbO6  
    PLOT #2h+dk$1  
    BLUE o[o:A|n  
    TRA P 0 0 11 }0$mn)*k  
    END