SYNOPSYS 光学设计软件课程十三：带有Kinoform镜头的激光扩束器

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在第11课中，您了解了如何使用普通球面透镜设计激光扩束器，并了解到需要多个透镜元件才能获得良好的性能。 第12课采用相同的设计，使用两个非球面元件，效果极佳。 本课程将证明您可以使用DOE（衍射光学元件）。 CXx*_@}MU  
目标是将腰半径为0.35mm的HeNe激光器转换成直径为10mm且均匀至10％以内的光束。 SBk4_J/_  
这是我们初始的输入文件：

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    RLE                ! Beginning of lens input file. 。 MK
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    ID KINOFORM BEAM SHAPER `V)8 QRN(  
    WA1 .6328               ! Single wavelength 2,b(,3{`4:  
    UNI MM           ! Lens is in millimeters Zbt.t]N  
    OBG .35 1          ! Gaussian object; waist radius -.35 mm; define full aperture = 1/e**2 point. S3*`jF>q  
    1    TH 22          ! Surface 2 is 22 mm from the waist . /cQueUME`  
    2    RD -2 TH 2 GTB S ! Guess some reasonable lens parameters; use glass type SF6 from Schott catalog =M[bnq*\  
    SF6 +YKi,  
    3    TH 20          ! Surface 3 is a kinoform on side 2 of the first element 1POmP&fI(  
    3 USS 16          ! Defined as Unusual Surface Shape 16 (simple DOE) b;W3j  
    CWAV .6328      ! Zones are defined as one wave phase change at this wavelengt CMG&7(MR  
    HIN 1.7988 55      ! Assume the zones are machined into the lens.  You can also apply  ! a film of a different index. H0gbSd+  
    RNORM 1 /1V xc 6  
$)ijN^hV  
    4 TH 2 GTB S o!Ieb  
    SF6
6"5A%{J  
    4 USS 16 {{D)YldtA  
    CWAV .6328 "W7K"=X  
    HIN 1.7988 55 S\YTX%Xm}  
    RNORM 1 }1c|gQ  
         ! The first side of the second element is also a DOE 0oZ= yh  
    5 CV 0 TH 50      ! Start with a flat surface lH x^D;m6  
    7               ! Surfaces 6 and 7 exist $m{:C;UH  
    AFOCAL           ! because they are required for AFOCAL output. uLL]A>vR  
    END           ! End of lens input file.


JHM9  
    PANT      ! Start of variable parameter definitions. %G_B^p4  
    RDR .001     ! This is a very small beam, so use smaller derivative increments to start with VY FaQe_;  
    2 RAD r4XK{KHn  
    VLIST TH 3  ! Vary the airspace ll<Xz((o  
    VY 3 G 26     ! Vary term Y**2, $%CF8\0  
    VY 3 G 27     ! Y**4, rJT^H5!o"  
    VY 3 G 28     ! and Y**6 ,c$_t
+  
3G)#5Lf<  
    VY 4 G 26     ! Do the same at surface 4 Yz/md1T$  
    VY 4 G 27 NMa}{*sQ  
    VY 4 G 28 vMi;+6'n>  
`iAF3:  
    END h-#6av:  
t7dt*D_YqK  
    AANT           ! Start of merit function definition mPtZO*Fc  
    AEC ,.83m%i  
    ACC hk(ZM#Bh  
    LUL 150 1 1 A TOTL      ! Prevent the system from growing too large +,TRfP Fb  
    M 5 1 A P YA 0 0 1 0 5     ! Ask for a beam radius of 5 mm on surface 5 Qcq`libK  
|mdVdD~go  
    M 0 1 A P FLUX 0 0 1 0 6 ! Ask for a flux falloff of zero at several zones h5{'Q$Erl  
    M 0 1 A P FLUX 0 0 .98 0 6 G_3O]BMKd)  
    M 0 1 A P FLUX 0 0 .97 0 6 DnMwUykF>0  
    M 0 1 A P FLUX 0 0 .96 0 6 W#4 7h7M  
    M 0 1 A P FLUX 0 0 .95 0 6 H1pO!>M  
    M 0 1 A P FLUX 0 0 .94 0 6 QuF:p  
    M 0 1 A P FLUX 0 0 .93 0 6 Xtq_y'I  
    M 0 1 A P FLUX 0 0 .92 0 6 c)TPM/>(p  
    M 0 1 A P FLUX 0 0 .91 0 6 dUeN*Nq&(,  
    M 0 1 A P FLUX 0 0 .85 0 6 N ,'GN[s  
    M 0 1 A P FLUX 0 0 .8 0 6 dh`K`b4I  
        M 0 1 A P FLUX 0 0 .7 0 6 ENl)Ts`y  
    M 0 1 A P FLUX 0 0 .5 0 6 ]_mb7X>  
    M 0 1 A P FLUX 0 0 .3 0 6 $k@O`xD,q  
    GSO 0 .1 10 P           ! Control the output ray OPD over an SFAN of 10 rays, ;v)JnbsH}  
    GSR 0 100 10 P          ! and some transverse aberrations too. ?>D+ge  
    END                ! End of merit function definition. 1b`1{%  
    SNAP _wbF>z  
    SYNO 40

}WC[$Y_@  
    FLUX 100 P 6

0rQMLx  
    M    50 .01 A P HSFREQ 0 0 1 0 4

XV7Ex\D*  
    DPROP P 0 0 3 SURF 3 L RESAMPLE

d\&U*=  
DPROP P 0 0 6 SURF 3 L RESAMPLE

LiC*@W  
    RLE 2.`\  
    ID KINOFORM BEAM SHAPER &&5a
M  
     FNAME 'L13L1.RLE                                         ' <,3
a3  
     MERIT   0.270980E-05 1*P~!2h  
     WA1 .6328000 /QK6Rac-  
     WT1 1.00000 jnkR}wAA  
     APS               1
I13y6= d  
     AFOCAL J|W<;  
     UNITS MM 2prU  
     OBG   0.35000000       1.0000000
@+&LYy72  
    0    AIR .Yamc
#A-  
    1    CV      0.0000000000000   TH     22.00000000 AIR /H[=5  
    2    RAD     -0.8227781050995   TH      2.00000000 sNbxI|B  
       2 N1 1.79881710 NlA,'`,  
       2 CTE   0.810000E-05 e[{0)y>=  
    2    GTB S    'SF6             ' S*,17+6dV  
    3    CV      0.0000000000000   TH     74.00214849 AIR gldAP:  
       3 USS  16 poc`q5i+  
     CWAV        0.632800 6B8VfQ9[  
     HIN        1.798800       55.000000 =Pyj%4Rs  
       RNORM    1.00000 {UX!go^J  
       3 XDD  1   0.0000000E+00  0.0000000E+00  0.0000000E+00  0.0000000E+00  0.0000000E+00 z{%<<pZ  
       3 XDD  2   0.0000000E+00  0.0000000E+00  0.0000000E+00  0.0000000E+00  0.0000000E+00 %e8@*~h@  
       3 XDD  3   2.6875641E+02  5.7065730E+01 -4.1566734E+01  2.8677115E+01 -1.6241740E+01 vOH4#  
    3    XDD  4   4.7211923E+00  0.0000000E+00  0.0000000E+00  0.0000000E+00 o@_q]/Mh  
    4    CV      0.0000000000000   TH      2.00000000 rP'me2 B  
       4 N1 1.79881710 `Y0%cXi3  
       4 CTE   0.810000E-05 ] 7[ 3>IN  
       4 GTB S    'SF6             ' +N]J5Ve-`t  
       4 USS  16 F;
Spi  
     CWAV        0.632800 <jBF[v9*m(  
     HIN        1.798800       55.000000 OW&!at  
       RNORM    1.00000 &Gc9VF]o  
       4 XDD  1   0.0000000E+00  0.0000000E+00  0.0000000E+00  0.0000000E+00  0.0000000E+00 V%t.l  
       4 XDD  2   0.0000000E+00  0.0000000E+00  0.0000000E+00  0.0000000E+00  0.0000000E+00 8$]1M,$r  
       4 XDD  3   5.6803879E+00 -9.1936550E-03  6.0997390E-04 -5.7203063E-05  2.2090382E-06 _f7 9wx\B  
    4    XDD  4  -3.5824860E-08  0.0000000E+00  0.0000000E+00  0.0000000E+00 "-E\[@/  
    5    RAD   -159.6274584523634   TH     50.00000000 AIR =?5]()'*n  
    6    CV      0.0000000000000   TH      0.00000000 AIR K,tQ!kk  
    7    CV      0.0000000000000   TH      0.00000000 AIR  END