| yazhuge |
2005-10-21 19:57 |
Refractive projection objective（折射投影物镜）--版主继续革命！！
Abstract =Hx]K8N )
Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. xq<X:\O
-------------------------------------------------------------------------------- ]-cST tO
Inventors: Rostalski, Hans-Juergen; (Berlin, DE) ; Schuster, Karl-Heinz; (Koenigsbronn, DE) ; Hudyma, Russell; (San Ramon, CA) ; Ulrich, Wilhelm; (Aalen, DE) ; Freimann, Rolf; (Aalen, DE) 2B"&WKk
Correspondence Name and Address: SUGHRUE MION, PLLC l;i /$Yu7
2100 PENNSYLVANIA AVENUE, N.W. ' wni.E&
SUITE 800 ~|( eh9
WASHINGTON 4/AE;y X
DC \g R%PN
20037 Ticx]_+~T
US 45;e y }8
p} { H%L
Assignee Name and Adress: CARL ZEISS SMT AG FaQc@4%o
@7 K(_Wd
Serial No.: 931051 '
r/xBj[Z
Series Code: 10 n50W HlMtt
Filed: September 1, 2004 .I.B,wH8
CD[}|N
U.S. Current Class: 359/649 %S/?Ci
U.S. Class at Publication: 359/649 ZdgzPs "
Intern'l Class: G02B 003/00; G02B 009/00 Q) =LbR{#
u=t.1eS5
-------------------------------------------------------------------------------- g
cb6*@u!
Ug\$Ob5=q
Foreign Application Data LB`{35b-
8p]9A,Uq&
-------------------------------------------------------------------------------- ;OZl'
. %`
Date Code Application Number @MO/LvD
Sep 12, 2003 WO 03/075049 A2 2P ^x'I
Feb 6, 2003 WO PCT/EP03/01147 \P7<q,OGS
Sep 12, 2003 WO 03/075096 A2 )3k?{1:
es<8"CcP
-------------------------------------------------------------------------------- MUSsanCA
bvS6xU-
J
Claims \,pObWm
}$i/4?dYsQ
-------------------------------------------------------------------------------- IKV!0-={!z
1. A refractive projection objective for microlithography with a numerical aperture NA greater than 0.7, consisting of: a first lens group immediately following an object plane of the projection objective and having negative refractive power; a second lens group immediately following the first lens group and having positive refractive power; a third lens group immediately following the second lens group and having negative refractive power for generating a constriction of a light beam passing through the projection objective; a fourth lens group immediately following the third lens group and having positive refractive power; and a fifth lens group immediately following the fourth lens group and having positive refractive power; the projection objective thereby consisting of a first convexity, a second convexity, and a waist arranged between the first and second convexity, wherein the first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. r1:CHIwK
%77uc9}
2. A refractive projection objective according to claim 1, wherein the following relationship of the maximum diameters holds: 0.9<D.sub.1/D.sub.2<1.0. a |#TnSk
&f2:aT)
3. A refractive projection objective which, in the direction of propagation of the light, consists of a first lens group with negative refractive power, of a second lens group with positive refractive power, and of a third lens group with negative refractive power, for the provision of a constriction of the light beam, and of a following fourth lens group with positive refractive power, and of a system diaphragm with a following fifth lens group, which has positive refractive power, wherein before the diaphragm and after the diaphragm a respective meniscus lens curved toward the object is arranged. 。。。。。。
|
|