美“
纳米制造基础及应用” Nanofabrication - Fundamentals & Applications
ESs\O?nO 1M-pr 8:6s 目录:
P>L +t`' E7hhew Z)!C'c b Chapter 1 Atom, Molecule, and Nanocluster Manipulations
)0MB9RMk1 for Nanostructure Fabrication Using Scanning
}G=M2V<L Probe Microscopy 1
l6B@qYLZ A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo
ex|F|0k4} Chapter 2 Atomic Force Microscope Lithography 33
PH"%kCI: N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park
zi:BF60]= Chapter 3 Scanning Probe Arrays for Nanoscale Imaging,
.hiSw Sensing, and Modification 65
l2d{ 73h C. Santschi, J. Polesel-Maris, J. Brugger,
d _
e WcI and H. Heinzelmann
iE{&*.q_}> Chapter 4 Using Biomolecules for Self-Assembly of Engineered
2:R+tn(F Nano-Scale Structures and Devices 127
.pq%?& R. Mehta, J. Lund, and B. A. Parviz
598i^z{~0% Chapter 5 Nanofabrication Based on Self-Assembled
f?b"i A(6 Alumina Templates 159
'S~5"6r S. Sen and N. A. Kouklin
\9d$@V Chapter 6 Nanowire Assembly and Integration 187
/ xQPTT Z. Gu and D. H. Gracias
JRFtsio* Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213
5;S.H#YOpO L. Tong and E. Mazur
K^$=dLp Chapter 8 Extreme Ultraviolet Lithography 235
z~Q)/d,Ac H. Kinoshita
OB7hlW Chapter 9 Electron Projection Lithography 285
fnY.ao1-s[ T. Miura, K. Suzuki, H. Arimoto, and S. Kawata
BHw, 4#F1; Chapter 10 Electron Beam Direct Writing 341
n(Uyz`qE K. Yamazaki
h~26WLf. Chapter 11 Electron Beam Induced Deposition 377
aT<q=DO K. Mitsuishi
VX/#1StC Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399
6RM/GM P. A. Crozier and C. W. Hagen
U&xUfBDt Chapter 13 Focused Ion Beams and Interaction with Solids 431
2oU_2P T. Ishitani, T. Ohnishi, and T. Yaguchi
$N\Ja*g Chapter 14 Nano/Microstructuring of Ceramic Surfaces
]?)TdJ` by Unconventional Lithographic Methods 471
7|D +Ihy; R. C. Salvarezza and O. Azzaroni
-+5>|N# Chapter 15 Alternative Nanofabrication Approaches
s(^mZ
-i f or Non-CMOS Applications 499
j4b4!^fV C. V. Cojocaru, F. Cicoira, and F. Rosei
&R siVBA Chapter 16 Nanofabrication of Nanoelectromechanical Systems
[V!tVDs&'o (NEMS): Emerging Techniques 543
Ug`djIL K. L. Ekinci and J. Brugger
Wf<LR3 *dF>_F [ 此帖被wildcat在2009-11-17 18:36重新编辑 ]