美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applics [复制链接]

美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications }SUe 4r&4}  
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目录： r|?2@VE  
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Chapter 1 Atom, Molecule, and Nanocluster Manipulations ;h0?o*i_  
                for Nanostructure Fabrication Using Scanning ,f}s!>j  
                Probe Microscopy 1 .CwMxuW  
                A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo 7}TjOWC  
Chapter 2 Atomic Force Microscope Lithography 33  yZdM4`  
                N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park  1=W>zC  
Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, k@KX=mG<  
                Sensing, and Modification 65 CO5?UgA  
                C. Santschi, J. Polesel-Maris, J. Brugger, %|l*=v  
                and H. Heinzelmann oNl_r:G
 
Chapter 4 Using Biomolecules for Self-Assembly of Engineered Z</$~ T  
                Nano-Scale Structures and Devices 127 _g$6vx&  
               R. Mehta, J. Lund, and B. A. Parviz &d9";V"E  
Chapter 5 Nanofabrication Based on Self-Assembled IjJ3CJ<  
               Alumina Templates 159 QJ>+!p*  
               S. Sen and N. A. Kouklin gd/W8*NFR  
Chapter 6 Nanowire Assembly and Integration 187 wQ4/eQ*  
                Z. Gu and D. H. Gracias %J2u+K  
Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 !3?HpR/nV  
                 L. Tong and E. Mazur a;([L8^7$l  
Chapter 8 Extreme Ultraviolet Lithography 235 /38^N|/Zr  
                 H. Kinoshita T9N /;3  
Chapter 9 Electron Projection Lithography 285 eUx|_*`  
                 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata d}ue/hdw  
Chapter 10 Electron Beam Direct Writing 341 pkBmAJb@  
                   K. Yamazaki Q]IpHNt[>  
Chapter 11 Electron Beam Induced Deposition 377 U,aV{qz  
                   K. Mitsuishi 5I t+ S+a  
Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 (MwB%g  
                   P. A. Crozier and C. W. Hagen MP0gLi  
Chapter 13 Focused Ion Beams and Interaction with Solids 431 S :9zz  
                    T. Ishitani, T. Ohnishi, and T. Yaguchi f>l}y->-Ug  
Chapter 14 Nano/Microstructuring of Ceramic Surfaces 8[2^`g  
                  by Unconventional Lithographic Methods 471 /,GDG=ra  
                  R. C. Salvarezza and O. Azzaroni +<8r?d2  
Chapter 15 Alternative Nanofabrication Approaches o D:
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f                 or Non-CMOS Applications 499 gnx!_H\h<  
                   C. V. Cojocaru, F. Cicoira, and F. Rosei CXvL`d"  
Chapter 16 Nanofabrication of Nanoelectromechanical Systems }|AUV  
                  (NEMS): Emerging Techniques 543 H-^>Co_  
                  K. L. Ekinci and J. Brugger QTtcGU  
80 i<Ij8J  

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3X!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!

一直想学习下纳米制造的工艺和理论，谢谢楼主分享