美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applics [复制链接]

美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications 09pnM|8A  
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目录： GMRw+z4  
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Chapter 1 Atom, Molecule, and Nanocluster Manipulations lw0l86^Y  
                for Nanostructure Fabrication Using Scanning *?%DdVrO@  
                Probe Microscopy 1 LDHu
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                A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo 7:t+  
Chapter 2 Atomic Force Microscope Lithography 33 jD9^DzFx  
                N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park fQq'_q5  
Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, b_@MoL@A!  
                Sensing, and Modification 65 Lh0Pvq0C  
                C. Santschi, J. Polesel-Maris, J. Brugger, 4vcUHa|4  
                and H. Heinzelmann PX}YDC zP$  
Chapter 4 Using Biomolecules for Self-Assembly of Engineered sI/Jhw)  
                Nano-Scale Structures and Devices 127 Hzh?w!Ow  
               R. Mehta, J. Lund, and B. A. Parviz lO>w|=<  
Chapter 5 Nanofabrication Based on Self-Assembled  RSXYz8{  
               Alumina Templates 159 jHq.W95+P  
               S. Sen and N. A. Kouklin ju`x   
Chapter 6 Nanowire Assembly and Integration 187 _oxhS!.*  
                Z. Gu and D. H. Gracias iE>E*!aBg  
Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 V9qA.NV2  
                 L. Tong and E. Mazur k2o98bK&;  
Chapter 8 Extreme Ultraviolet Lithography 235 <eKF  
                 H. Kinoshita 8.bIP ju%v  
Chapter 9 Electron Projection Lithography 285 &=y)C/u  
                 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata 8V@ /h6-e,  
Chapter 10 Electron Beam Direct Writing 341 :hB/|H*=  
                   K. Yamazaki <5 G+(vP  
Chapter 11 Electron Beam Induced Deposition 377 )J#7:s]eo  
                   K. Mitsuishi :786Z,'
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Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 Kf#9-.}?  
                   P. A. Crozier and C. W. Hagen +m kub}<a  
Chapter 13 Focused Ion Beams and Interaction with Solids 431 +]P??`,R;  
                    T. Ishitani, T. Ohnishi, and T. Yaguchi Z}6
  
Chapter 14 Nano/Microstructuring of Ceramic Surfaces CEjMHP$=  
                  by Unconventional Lithographic Methods 471 FjD`bhw-  
                  R. C. Salvarezza and O. Azzaroni Ub!MyXd{q  
Chapter 15 Alternative Nanofabrication Approaches :clMO|  
f                 or Non-CMOS Applications 499 Xl^=&!S>me  
                   C. V. Cojocaru, F. Cicoira, and F. Rosei jC7`_;>=  
Chapter 16 Nanofabrication of Nanoelectromechanical Systems %_N-~zZ1E  
                  (NEMS): Emerging Techniques 543 NrPs :`  
                  K. L. Ekinci and J. Brugger T7_i:HU%  
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3X!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!

一直想学习下纳米制造的工艺和理论，谢谢楼主分享