美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applics [复制链接]

美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications 4v`;D,dI
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目录： Z{_YH7_  
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Chapter 1 Atom, Molecule, and Nanocluster Manipulations O#)YbaE  
                for Nanostructure Fabrication Using Scanning eqyUI|e  
                Probe Microscopy 1 &#'
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                A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo |8akp  
Chapter 2 Atomic Force Microscope Lithography 33 x, 'KI?TyQ  
                N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park pc;`Fz/`7  
Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, 9]|C$;kw@  
                Sensing, and Modification 65 Qgq VbJP"  
                C. Santschi, J. Polesel-Maris, J. Brugger, 2Xv$
  
                and H. Heinzelmann E/^N   
Chapter 4 Using Biomolecules for Self-Assembly of Engineered V:lKF')  
                Nano-Scale Structures and Devices 127 1gX$U00:  
               R. Mehta, J. Lund, and B. A. Parviz =
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Chapter 5 Nanofabrication Based on Self-Assembled tjcsT>  
               Alumina Templates 159 "lB%"}  
               S. Sen and N. A. Kouklin u_Xp
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Chapter 6 Nanowire Assembly and Integration 187 @$;I%  
                Z. Gu and D. H. Gracias >ni0:^vp  
Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 ixB"6O  
                 L. Tong and E. Mazur |[$TT$
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Chapter 8 Extreme Ultraviolet Lithography 235 R^yh,  
                 H. Kinoshita ZUl-&P_X  
Chapter 9 Electron Projection Lithography 285 n -x
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                 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata 3O|2Z~>3  
Chapter 10 Electron Beam Direct Writing 341
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                   K. Yamazaki `F_R J.g*p  
Chapter 11 Electron Beam Induced Deposition 377 5GURfG3{  
                   K. Mitsuishi ~b6c:db3  
Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 WA#y&  
                   P. A. Crozier and C. W. Hagen w$jSlgUHy)  
Chapter 13 Focused Ion Beams and Interaction with Solids 431 tSVS ogGd  
                    T. Ishitani, T. Ohnishi, and T. Yaguchi C-^8;xd  
Chapter 14 Nano/Microstructuring of Ceramic Surfaces c7]0>nU;  
                  by Unconventional Lithographic Methods 471 <lRjh7  
                  R. C. Salvarezza and O. Azzaroni jT4 m(j  
Chapter 15 Alternative Nanofabrication Approaches {gB9EGY  
f                 or Non-CMOS Applications 499 s6Il3Kf  
                   C. V. Cojocaru, F. Cicoira, and F. Rosei bj@f<f`  
Chapter 16 Nanofabrication of Nanoelectromechanical Systems ~eXI}KhBw6  
                  (NEMS): Emerging Techniques 543 *b"aJ<+  
                  K. L. Ekinci and J. Brugger JHJ]BMm  
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3X!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!

一直想学习下纳米制造的工艺和理论，谢谢楼主分享