美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applics [复制链接]

美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications .8!0biS  
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目录： EM/+1 _u  
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Chapter 1 Atom, Molecule, and Nanocluster Manipulations o#) !b:/  
                for Nanostructure Fabrication Using Scanning PcHFj+:  
                Probe Microscopy 1 ;_aoM&  
                A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo J-<B*ot+lX  
Chapter 2 Atomic Force Microscope Lithography 33  ?|J+dW  
                N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park d)ZSzq  
Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, Le JlTWotC  
                Sensing, and Modification 65 9prsL#Fn  
                C. Santschi, J. Polesel-Maris, J. Brugger, 15 11<,  
                and H. Heinzelmann gtGKV  
Chapter 4 Using Biomolecules for Self-Assembly of Engineered
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                Nano-Scale Structures and Devices 127 5 h
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               R. Mehta, J. Lund, and B. A. Parviz si_HN{  
Chapter 5 Nanofabrication Based on Self-Assembled *m@w^In^  
               Alumina Templates 159 l1Q+hz5"*U  
               S. Sen and N. A. Kouklin 5@+Ei25  
Chapter 6 Nanowire Assembly and Integration 187 pNQkKDbL+  
                Z. Gu and D. H. Gracias hr6e1Er  
Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 =DTOI  
                 L. Tong and E. Mazur KBqaI((  
Chapter 8 Extreme Ultraviolet Lithography 235 cu?(P;mQi  
                 H. Kinoshita {4aY}= -Q*  
Chapter 9 Electron Projection Lithography 285 ]"g >>N  
                 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata vW-`=30  
Chapter 10 Electron Beam Direct Writing 341 sg"D;b:X  
                   K. Yamazaki XJ~l5}y ]  
Chapter 11 Electron Beam Induced Deposition 377 7XWBI\SW  
                   K. Mitsuishi @H%=%ZwpO  
Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 s8d}HI  
                   P. A. Crozier and C. W. Hagen m{.M,Lm:  
Chapter 13 Focused Ion Beams and Interaction with Solids 431 e=z_+gVm  
                    T. Ishitani, T. Ohnishi, and T. Yaguchi A=C3e4.C  
Chapter 14 Nano/Microstructuring of Ceramic Surfaces rL sK-qQ  
                  by Unconventional Lithographic Methods 471 /+t[,  
                  R. C. Salvarezza and O. Azzaroni G0 /vn9&  
Chapter 15 Alternative Nanofabrication Approaches ;Fem<p)V  
f                 or Non-CMOS Applications 499 3|+f si)x  
                   C. V. Cojocaru, F. Cicoira, and F. Rosei }R&5qpl  
Chapter 16 Nanofabrication of Nanoelectromechanical Systems &f<1=2dm  
                  (NEMS): Emerging Techniques 543 !GGGh0Bj  
                  K. L. Ekinci and J. Brugger IPR tm!  
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一直想学习下纳米制造的工艺和理论，谢谢楼主分享