美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applics [复制链接]

美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications Np>0c-S  
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目录： PmlQW!gfBi  
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Chapter 1 Atom, Molecule, and Nanocluster Manipulations J 7]LMw7  
                for Nanostructure Fabrication Using Scanning a{+;&j[!  
                Probe Microscopy 1 ?a{>QyL  
                A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo Igb%bO_  
Chapter 2 Atomic Force Microscope Lithography 33 fk'DJf[M  
                N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park ^)S<Ha  
Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, }ZkGH}K_}  
                Sensing, and Modification 65 @i>o
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                C. Santschi, J. Polesel-Maris, J. Brugger, jFGY`9Zw0  
                and H. Heinzelmann m?]= =9  
Chapter 4 Using Biomolecules for Self-Assembly of Engineered szas(7kDS  
                Nano-Scale Structures and Devices 127 *#
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               R. Mehta, J. Lund, and B. A. Parviz Tk:%
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Chapter 5 Nanofabrication Based on Self-Assembled pL`)^BJ  
               Alumina Templates 159 ^9`~-w  
               S. Sen and N. A. Kouklin =:(<lKf,<F  
Chapter 6 Nanowire Assembly and Integration 187 yPT\9"/  
                Z. Gu and D. H. Gracias 3Nk )  
Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 WS2@; 8.N  
                 L. Tong and E. Mazur t[%ELHV  
Chapter 8 Extreme Ultraviolet Lithography 235 ]tc Cr;  
                 H. Kinoshita ,N@N4<C]  
Chapter 9 Electron Projection Lithography 285 &U{"dJr  
                 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata k?`Q
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Chapter 10 Electron Beam Direct Writing 341 jOU1F1  
                   K. Yamazaki v.{I^=  
Chapter 11 Electron Beam Induced Deposition 377 ;;<[_gp,E  
                   K. Mitsuishi =`MMB|{6  
Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 _2rxDd1#.  
                   P. A. Crozier and C. W. Hagen j\TS:F^z  
Chapter 13 Focused Ion Beams and Interaction with Solids 431 l4Qv$  
                    T. Ishitani, T. Ohnishi, and T. Yaguchi $X]Z-RCK3  
Chapter 14 Nano/Microstructuring of Ceramic Surfaces e<-^  
                  by Unconventional Lithographic Methods 471 m}GEx)Y D  
                  R. C. Salvarezza and O. Azzaroni 7^n{BsN
 
Chapter 15 Alternative Nanofabrication Approaches d1hXzJs  
f                 or Non-CMOS Applications 499 'jjJ[16"d  
                   C. V. Cojocaru, F. Cicoira, and F. Rosei Vo(V<2lw}  
Chapter 16 Nanofabrication of Nanoelectromechanical Systems `!7QegJa"  
                  (NEMS): Emerging Techniques 543 @+(a{%~7y  
                  K. L. Ekinci and J. Brugger <:I]0|[  
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3X!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!

一直想学习下纳米制造的工艺和理论，谢谢楼主分享